Double buffer photoresist spraying system

A double-buffering and double-buffering technology, applied in liquid ejection devices, ejection devices, separation methods, etc., can solve the problems of generating air bubbles, increasing the cost of photoresist liquid use, and time-consuming, so as to ensure non-stop supply and save light. Liquid resistance and strong performance

Active Publication Date: 2021-12-31
芯米(厦门)半导体设备有限公司
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AI Technical Summary

Problems solved by technology

[0007] However, during the pre-wetting process of the filter, air bubbles will be generated due to the influence of speed, pressure or temperature
If the coating operation is carried out directly, the coating effect will be affected
If the exhaust operation is performed after pre-wetting, it will take more time and increase the cost of photoresist fluid, making filter replacement a time-consuming and cost-intensive procedure

Method used

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Embodiment Construction

[0022] During the photoresist coating process, there will be phenomena such as poor coverage and poor flatness. One of the reasons for these phenomena is that air bubbles remain inside the photoresist during the filter pre-wetting process, making the photoresist not Continuous coating on chip (wafer) surface. However, to avoid the above-mentioned reasons, photoresist fluid is usually wasted, and photoresist fluid is an expensive material.

[0023] Therefore, the present invention provides a double-buffer photoresist liquid spraying system to solve the above-mentioned shortcomings. For a clearer representation, the present invention will be described in detail below in conjunction with the accompanying drawings.

[0024] The embodiment of the present invention provides a double-buffer photoresist spraying system, please refer to figure 1 , the system includes:

[0025] The first liquid storage tank 100 is used to store and supply photoresist liquid (photoresist liquid figur...

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Abstract

A double-buffer photoresist liquid spraying system, characterized in that it includes: a first liquid storage tank, a first filter; a first buffer; the first filter is arranged between the first liquid storage tank and the between the first buffers; the first buffer is connected with a first return pipe; the first return pipe is equipped with a first return pump; a second liquid storage tank; a second filter; Buffer; the second filter is arranged between the second liquid storage tank and the second buffer; the second buffer is connected with a second return pipe; the second return pipe is installed There is a second back pump; it also includes one of the following two structures: the first structure includes the selection mechanism and the total photoresist liquid pump; the second structure includes the selection mechanism, the first photoresist liquid pump and the second photoresist liquid pump. Two photoresist liquid pumps. The double-buffer photoresist liquid spraying system can better save photoresist liquid and ensure non-stop supply of photoresist liquid.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a double-buffer photoresist liquid spraying system. Background technique [0002] Photoresist coating (Coating) plays a very important role in the field of semiconductor manufacturing. For example, in the etching process, the photoresist layer is used as a mask for the etched film to keep the desired pattern from being removed by the etching reaction. Another example is in the ion implantation (ion implantation) process, the photoresist layer also has the function of a mask, so that doping is only doped into a predetermined area. [0003] The photoresist liquid spraying system mainly includes structures such as a first liquid storage tank, a first buffer, a first photoresist liquid pump, a filter, a control valve, and a nozzle. The photoresist liquid supplied from the first liquid storage tank first enters the first buffer, and then the photoresist liquid in the first...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05B15/40B05B9/04B05B12/14B01D35/12
CPCB05B15/40B05B9/0403B05B12/14B01D35/12B05B9/0406
Inventor 尹安和
Owner 芯米(厦门)半导体设备有限公司
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