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Carrying manipulator and cleaning equipment

A technology of manipulators and components, which is applied in the field of handling manipulators and cleaning equipment, can solve problems such as poor cleaning effect of furnace tubes, existence of dead angles, and failure of targeted cleaning of furnace tubes, etc., to achieve the effect of facilitating thorough cleaning and improving cleaning efficiency

Pending Publication Date: 2020-09-25
CHANGZHOU S C EXACT EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During cleaning, the furnace tube is placed horizontally or obliquely on the handling manipulator, and the furnace tube remains in this state throughout the cleaning and handling process. There are dead angles during the cleaning process of the furnace tube, and it is not possible to carry out targeted cleaning for furnace tubes of different specifications. Cleaning, resulting in poor cleaning effect of the furnace tube

Method used

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  • Carrying manipulator and cleaning equipment
  • Carrying manipulator and cleaning equipment
  • Carrying manipulator and cleaning equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0064] Such as Figure 1 to Figure 5 As shown, one embodiment of the present invention provides a handling manipulator, including: a workbench 2, a frame 4, a first lifting assembly 6, a first driving assembly 8, a second lifting assembly 10, a second driving assembly 12 and a grasping hand assembly14.

[0065] Wherein, the frame 4 is slidably arranged on the workbench 2, one side of the frame 4 is provided with a first guide rail 402, and the other side is provided with a second guide rail 404; the first lifting assembly 6 is slidably arranged on the first guide rail 402; the first The driving assembly 8 is connected to the first lifting assembly 6, and is used to drive the first lifting assembly 6 to move on the first guide rail 402; the second lifting assembly 10 is slidably arranged on the second guide rail 404; the second driving assembly 12 is connected to the first The second lifting component 10 is used to drive the second lifting component 10 to move on the second gu...

Embodiment 2

[0069] Such as Figure 1 to Figure 5 As shown, one embodiment of the present invention provides a handling manipulator, including: a workbench 2, a frame 4, a first lifting assembly 6, a first driving assembly 8, a second lifting assembly 10, a second driving assembly 12 and a grasping hand assembly14.

[0070] Wherein, the frame 4 is slidably arranged on the workbench 2, one side of the frame 4 is provided with a first guide rail 402, and the other side is provided with a second guide rail 404; the first lifting assembly 6 is slidably arranged on the first guide rail 402; the first The driving assembly 8 is connected to the first lifting assembly 6, and is used to drive the first lifting assembly 6 to move on the first guide rail 402; the second lifting assembly 10 is slidably arranged on the second guide rail 404; the second driving assembly 12 is connected to the first The second lifting component 10 is used to drive the second lifting component 10 to move on the second gu...

Embodiment 3

[0077] Such as Figure 1 to Figure 5 As shown, one embodiment of the present invention provides a handling manipulator, including: a workbench 2, a frame 4, a first lifting assembly 6, a first driving assembly 8, a second lifting assembly 10, a second driving assembly 12 and a grasping hand assembly14.

[0078] Wherein, the frame 4 is slidably arranged on the workbench 2, one side of the frame 4 is provided with a first guide rail 402, and the other side is provided with a second guide rail 404; the first lifting assembly 6 is slidably arranged on the first guide rail 402; the first The driving assembly 8 is connected to the first lifting assembly 6, and is used to drive the first lifting assembly 6 to move on the first guide rail 402; the second lifting assembly 10 is slidably arranged on the second guide rail 404; the second driving assembly 12 is connected to the first The second lifting component 10 is used to drive the second lifting component 10 to move on the second gu...

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Abstract

The invention provides a carrying manipulator and cleaning equipment. The carrying manipulator comprises a workbench, a frame, a first lifting assembly, a first driving assembly, a second lifting assembly, a second driving assembly and a gripper assembly; the frame is arranged on the workbench in a sliding manner, a first guide rail is arranged on one side of the frame, a second guide rail is arranged on the other side of the frame; the first lifting assembly is arranged on the first guide rail in a sliding manner; the first driving assembly is connected to the first lifting assembly; the second lifting assembly is arranged on the second guide rail in a sliding manner; the second driving assembly is connected to the second lifting assembly; and the gripper assembly is connected to the first lifting assembly and the second lifting assembly. According to the carrying manipulator, in the process that carrying workpieces is carried out, the position and the inclination angle of the gripperassembly can be adjusted, so that the gripper assembly grabs the workpieces to be carried conveniently, and the workpieces to be carried with different specifications and shapes can be grabbed; and when the workpieces need to be cleaned, the cleaning angle of the workpieces can be adjusted, thoroughly cleaning can be conveniently carried out on the workpieces, and the cleaning efficiency can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular, to a handling robot and a cleaning device. Background technique [0002] In the field of semiconductors, the furnace tube needs to be cleaned. At present, the conventional furnace tube cleaning is completed by pickling, water washing, and drying. During cleaning, the furnace tube is placed horizontally or obliquely on the handling manipulator, and the furnace tube remains in this state throughout the cleaning and handling process. There are dead angles during the cleaning process of the furnace tube, and it is not possible to carry out targeted cleaning for furnace tubes of different specifications. Cleaning, resulting in poor cleaning effect of the furnace tube. Contents of the invention [0003] The present invention aims to solve at least one of the technical problems existing in the prior art. [0004] To this end, the first aspect of the present invention p...

Claims

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Application Information

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IPC IPC(8): B65G47/90
CPCB65G47/901
Inventor 左国军任金枝申斌陈雷
Owner CHANGZHOU S C EXACT EQUIP