IC manufacturing virtual simulation teaching platform

Abstract

The invention discloses an IC manufacturing virtual simulation teaching platform, which comprises a login module, a course learning module, a simulation practice module, a note management module and an assessment management module. The simulation practice module comprises a selection module used for students to operate so as to select an IC processing technological process which the students wantto practice, a parameter setting module used for students to operate so as to set parameters of equipment, and a simulation display module used for displaying the equipment simulation operation process to students according to the settings of the students. The assessment management module comprises a first setting module for teachers to set examination questions, a generation module used for generating electronic examination papers according to settings of teachers, an answer sheet module used for students to operate to complete electronic examination papers, and a reviewing module used for reviewing the electronic examination papers completed by the students. The IC manufacturing virtual simulation teaching platform has the advantages that the IC manufacturing virtual simulation teachingplatform solves the problem of difficulty in IC manufacturing process and technology teaching, and an efficient learning environment is created for students.

Description

technical field [0001] The invention relates to a virtual simulation teaching platform for IC manufacturing. Background technique [0002] In the existing teaching methods, students use textbooks to learn IC (integrated circuit) manufacturing process, technology, practical operation and other content. Traditional classroom teaching uses teachers as the main teaching relationship. Teachers pass on knowledge in the form of dictation and writing on the blackboard. The integrated circuit training course is demonstrated by the teacher, and most of the training reports are in paper format. Students' skills and knowledge are assessed in the form of paper examination papers. Teachers' review of test papers and reports is one-to-many manual review. [0003] The existing teaching methods are difficult to be close to industrial factories for practical and abstract content, resulting in insufficient students' initiative. Teachers face dozens or more students, and it is difficult to c...

AI Technical Summary

Problems solved by technology

[0003] The existing teaching methods are difficult to get close to industrial factories for practical and abstract content, resulting in insufficient students' initiative

Teachers face dozens or more students, and it is difficult to control the teaching progress

It takes a long time to prepare test questions, time-consuming and laborious to correct and analyze test papers, and it is difficult to save test papers for a long time

The curriculum and teaching mode are single, and it is difficult for students to grasp the course content

At the same time, IC manufacturing technology is a complex system engineering and comprehensive technology that integrates the most advanced scientific and technological achievements in the world today, and the experimental equipment in colleges and universities cannot carry out high-level practical training.

In addition, the equipment in the IC manufacturing process is expensive, the space is limited, and some processes are doped with harmful gases, which cannot be completely reproduced in the training room

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