High-precision angle fine adjustment mechanism

Abstract

The invention is suitable for the technical field of rotary table fine adjustment positioning, and particularly relates to a high-precision angle fine adjustment mechanism. The high-precision angle fine adjustment mechanism comprises a rotary plate, the mechanism further comprises a foundation table, wherein a sliding table structure capable of transversely sliding in the X-axis direction is connected to the foundation table, a tensioning mechanism capable of providing tensioning force for a sliding air floating block is arranged on the sliding table structure, the sliding air floating block can extrude a shaft matching air floating block by using the tensioning force provided by the tensioning mechanism, the shaft matching air floating block is mounted on the rotary plate through a rotating shaft, the rotary plate can rotate around a center shaft of the rotary plate, after the tensioning mechanism provides the tensioning force, the sliding air floating block can extrude the shaft matching air floating block by using the tensioning force provided by the tensioning mechanism, the sliding air floating block longitudinally moves in the Y-axis direction under the limitation that the rotary plate can only rotate around the center shaft of the rotary plate, the rotating shaft makes micro-angle motion along the anticlockwise direction by referring to the rotary plate, and simple micro-linear motion is converted into complex micro-angle motion, so that the purposes of high precision and high stability of angle fine adjustment are achieved.

Description

technical field [0001] The invention relates to the technical field of turntable fine-tuning and positioning, in particular to a high-precision angle fine-tuning mechanism. Background technique [0002] The air adsorption table is an ideal choice for the design of precision motion platforms. With high-precision air bearing guide rails, it can provide a higher linear or rotational reference. Compared with the traditional linear rail mechanical structure, it has the characteristics of ultra-low friction and high stability. [0003] Among them, the traditional micro linear motion conversion method is relatively simple, and its stability and precision are low, resulting in poor adjustment effect. Contents of the invention [0004] The purpose of the present invention is to provide a high-precision angle fine-tuning mechanism to solve the problem that the traditional micro-linear motion conversion method is relatively simple, its stability and precision are low, and the adjustm...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a high-precision angle fine-tuning mechanism to solve the problem that the traditional micro-linear motion conversion method is relatively simple, its stability and precision are low, and the adjustment effect is poor.

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