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A device and method for automatically adjusting the balance of semiconductor equipment

An automatic adjustment, semiconductor technology, applied in the direction of using feedback control, etc., can solve problems such as machine downtime and waste of time

Active Publication Date: 2021-02-19
晶芯成(北京)科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the surface of the wafer is generally scanned by adjusting the angle of the prism. When the position of the prism deviates, it usually needs to be corrected manually, which causes the machine to stop and wastes time.

Method used

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  • A device and method for automatically adjusting the balance of semiconductor equipment
  • A device and method for automatically adjusting the balance of semiconductor equipment
  • A device and method for automatically adjusting the balance of semiconductor equipment

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Embodiment Construction

[0035] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0036] It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual impleme...

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PUM

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Abstract

The invention proposes a device and method for automatically adjusting the balance of semiconductor equipment, including: a prism unit; a sensing unit, located at one end of the prism unit, for monitoring the position of the prism unit and sending a voltage signal; a measuring unit connected to The sensing unit is used to receive the voltage signal and form a voltage value; the receiving unit is connected to the measurement unit and is used to receive the voltage value and form a feedback signal; the analysis unit is connected to the receiving unit, Used to receive the feedback signal and form a pulse signal; a drive unit, the drive unit includes a driver and a drive motor, the driver is connected to the analysis unit, one end of the drive motor is connected to the driver, and the other end is connected to the The prism unit, the driver is used to receive the pulse signal, and the drive motor is used to adjust the position of the prism unit. The device for automatically adjusting the balance of semiconductor equipment proposed by the invention can improve work efficiency.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a device and method for automatically adjusting the balance of semiconductor equipment. Background technique [0002] The advanced integrated circuit manufacturing process generally includes hundreds of steps, and a small error in any link will lead to the failure of the entire chip, especially as the critical size of the circuit continues to shrink, its requirements for process control are becoming more and more stringent, so In order to find and solve problems in time during the production process, it is generally necessary to carry out online defect detection on products. The industry generally uses scanning machines to scan wafers for defects under a certain scanning program, and compares the number of defects obtained by scanning with the control limit to determine whether the defects on the wafer exceed the control standard, and to deal with it in a timely manner. T...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D3/12
CPCG05D3/12
Inventor 程长青殷赛赛
Owner 晶芯成(北京)科技有限公司