A real-time calibration compensation measurement method for flatness based on multi-psd

Abstract

The invention discloses a multi-PSD-based planarity implementation calibration compensation measurement method, the method includes: acquisition of target and reference data: acquiring the target PSD and multiple reference PSDs synchronously and in real time respectively 1 and PSD 2 Measurement data, synchronization error: 200ms; establishment of error model: According to the terrain environment where the test is located, analyze the influence of flatness accuracy and have a specific form of error is mainly ground vibration, and establish an error model in this environment; station Error separation: Next, perform multiple sets of test measurements, increase data samples, analyze the data, and separate errors; flatness real-time calibration: real-time compensation for flatness through the compensation system to ensure the flatness accuracy and compensation accuracy of the scanning test device (resolution less than 0.005mm). The vibration error of the laser plane generator itself can be effectively removed, and the plane compensation precision can be effectively improved.

Description

technical field [0001] The invention relates to a method for real-time flatness detection and compensation calibration of a planar motion device, in particular to a method for real-time flatness calibration and compensation based on multiple PSDs, and is especially suitable for real-time flatness calibration of large-scale high-precision electromagnetic wave planar scanning devices and compensation. Background technique [0002] The large-scale high-precision planar scanning device is one of the key equipment for electromagnetic wave testing such as testing the amplitude and phase characteristics of the quiet zone in the compact field, and near-field testing. At the same time, in the near-field test, the transceiver probe is always installed on the plane scanning device. By moving the probe in the plane and at the same time according to a certain sampling interval, the target is sent and received. , Absorbing characteristics and other electromagnetic characteristics are tes...

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Problems solved by technology

[0003] At present, there are two methods of compensation for large-scale plane scanning detection devices. One is to use high-precision large-scale measuring equipment such as laser trackers to measure the flatness of the plane scanning device and interpolate to calculate the error of each position, and write the error compensation amount into the motion The control system performs off-line compensation. This method cannot detect the change of the flatness error of the scanning device in real time during the detection process, and needs to perform error detection and calibration irregularly, and the real-time performance is poor; the second is to fix the position of the scanning device probe. The sensitive detector PSD can detect the flatness error of the scanning device in real time after receiving the laser signal, and feed back the error to the motion system in real time, so as to realize the dynamic real-time compensation of the flatness error. This method has good real-time performance and is suitable for field testing requirements, but it is often used The method is to directly compare the position information received by the PSD with the initial information to obtain the displacement error, and use this displacement error as a flatness error to directly feed back to the motion control system for compensation

In fact, the displacement error detected by PSD includes the flatness error of the scanning device and station errors such as the vibration of the PSD sensor and laser light source. The station error is also an important source that affects the flatness compensation accuracy of the scanning measurement device. Separation from the error to improve the real-time compensation accuracy of the flatness, which is rarely reported in the existing technical documents

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