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Cutting device, sensor unit, and detection method

A technology for cutting devices and detecting shafts, applied to electrical components, parts of grinding machine tools, grinding/polishing equipment, etc.

Active Publication Date: 2021-03-09
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in order to perform high-precision detection by this method, it is necessary to use a very expensive and precise detection unit, so there is a practical problem

Method used

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  • Cutting device, sensor unit, and detection method
  • Cutting device, sensor unit, and detection method
  • Cutting device, sensor unit, and detection method

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0058] Hereinafter, the present invention will be described based on the embodiments shown in the drawings. figure 1It is a schematic diagram of the cutting device 10 according to the first embodiment of the present invention. figure 1 (a) is a view of the cutting device 10 viewed from the Y-axis direction, which is the direction of the rotation axis of the blade 32, figure 1 (b) is a view of the cutting device 10 viewed from the X-axis direction perpendicular to the Y-axis direction which is the rotation axis direction of the blade 32 .

[0059] The cutting device 10 has a stage 20, a cutting unit 30, a fixed base 12, and the like. In addition, the cutting device 10 has an X-axis moving mechanism 26 , a Y-axis moving mechanism 39 , and a Z-axis moving mechanism 38 for moving the stage 20 or the cutting unit 30 ; and a sensor unit 18 for detecting the position of the blade 32 of the cutting unit 30 . In addition, in the description of the cutting device 10, the direction in ...

no. 2 approach

[0103] in addition, image 3 and Figure 4 The illustrated positional relationship between the first and second photodetectors 40 and 50 and the blade 32 is an example, and cutting devices having sensor units with various structures are included in the technical scope of the present invention. Figure 8 It is a conceptual diagram showing the positional relationship between the first photodetection unit 140 and the blade 32 of the sensor unit included in the cutting device according to the second embodiment of the present invention.

[0104] Such as Figure 8 shown, with Figure 4 Like the first photodetection unit 40 shown, the first photodetection unit 140 has a first emission portion 142 and a first incidence portion 144 . However, the configuration of the first emitting portion 142 and the first incident portion 144 of the first photodetecting portion 140 is the same as that of Figure 4 Unlike the illustrated first photodetection unit 40 , the first detection axis 146 ...

no. 3 approach

[0109] Figure 9 It is a conceptual diagram showing the positional relationship between the first photodetector 240 and the second photodetector 50 of the sensor unit included in the cutting device according to the third embodiment of the present invention, and the blade 32 . Figure 9 (a) shows the state which saw the blade 32 from the X-axis positive direction side, Figure 9 (b) shows the state which saw the blade 32 from the Z-axis positive direction side.

[0110] as from Figure 9 (a) and Figure 9 (b) It can be understood that in the third embodiment, the first intersection position 232c ( Figure 9 (b)) is largely separated from the second intersection position 32d where the second detection axis 56 intersects the rotation surface 32b. Such as Figure 9 As shown, even if the first intersection location 232c and the second intersection location 32d are largely separated ( Figure 9 , arranged at positions different from each other by 90 degrees), by correcting the...

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PUM

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Abstract

Provided is a cutting device with which it is possible to precisely and easily detect rattling of a blade. The cutting device has: a table on which an object is placed; a cutting part having a blade for cutting the object, and a rotation drive part for causing the blade to rotate; and a first photoelectric detection part for detecting the position of an edge portion of the blade, the first photoelectric detection part having a Z-axis movement mechanism for causing the table or the cutting part to move in a Z-axis direction in which the distance between a placement surface and a rotational axischanges, an X-axis movement mechanism for causing the table or the cutting part to move in an X-axis direction, a first emission part for emitting light, and a first incidence part disposed so as tosandwich the edge portion of the blade together with the first emission part, the light emitted by the first emission part being incident on the first incidence part. A first detection axis connectingthe first emission part and the first incidence part intersects an inclined direction with respect to the rotating surface of the blade.

Description

technical field [0001] The present invention relates to a cutting device that cuts an object using a blade. Background technique [0002] For example, a dicing machine is known as a cutting device using a blade such as a rotating grindstone as a technique for cutting out a wafer on which a plurality of electronic circuits is formed and a plurality of formed electronic components. In order to perform high-precision cutting using such a cutting machine, it is very important to manage the mounting state of the blade and the shape of the blade with high precision. [0003] As a cutting device capable of detecting the distance from the stage to the edge of the blade, a device in which a blade displacement detection device is disposed below the blade has been proposed (see Patent Document 1). However, such a blade displacement detection device has a problem that vibration of the blade cannot be detected. [0004] In addition, as a detection method for detecting vibration of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B27/06B24B49/12H01L21/301
CPCB24B49/12B24B27/06
Inventor 直井克夫津田启史定地龙男
Owner TDK CORPARATION