A kind of large-angle medium and long-wave infrared anti-reflection protective film and preparation method thereof
A long-wave infrared, large-angle technology, applied in optical components, instruments, optics, etc., can solve problems such as low transmittance, control error, and affecting the bonding strength of the film layer and the substrate
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[0031] The second aspect of the present invention provides a method for preparing a large-angle medium and long-wave infrared anti-reflection protective film, comprising the following steps:
[0032] 1) Polishing and surface treatment are carried out to the ZnS substrate;
[0033] 2) On the ZnS substrate, deposit the first ZnS layer, the first YbF layer in sequence 3 layer, second ZnS layer, second YbF 3 layer, third ZnS layer, third YbF 3 layer and Al 2 o 3 outer layer;
[0034] Among them, the thickness of each layer is:
[0035] 1st ZnS layer: 80-120nm, 1st YbF 3 Layer: 140-160nm, 2nd ZnS layer: 230-250nm, 2nd YbF 3 Layer: 370-390nm, third ZnS layer: 150-160nm, third YbF 3 Layer: 920-930nm, Al 2 o 3 Outer layer: 30-90nm.
[0036] Preferably, the deposition evaporation beam current of the first ZnS layer, the second ZnS layer and the third ZnS layer is 15-25mA, and the first YbF 3 layer, second YbF 3 layer and third YbF 3 The deposition evaporation beam current...
Embodiment 1
[0056] 1) Choose a ZnS base layer with a thickness of 1.5mm, and perform mechanical polishing to make the surface finish reach level III. Surface treatment was carried out on the polished ZnS base layer, respectively, using acetone, absolute ethanol, and pure water to clean it in ultrasonic waves for 10 minutes. After taking it out, wipe the surface and dry it in an oven at 100°C for 10 minutes. Clean the surface of the dried ZnS base layer, wipe the surface with nano-diamond powder for 5 minutes, and then wipe it with absolute ethanol until the surface is clean, and place it on the sample holder in the chamber of the coating machine.
[0057] 2) Place the coating materials ZnS and YbF3 in molybdenum boats respectively, and place the coating materials Al 2 o 3 Placed in the electron gun crucible. Seal the vacuum chamber and form a vacuum environment. At the same time, heat and bake the substrate. The baking temperature is 200°C. When the vacuum degree reaches 3.8×10 -3 At P...
Embodiment 2
[0067] 1) A ZnS base layer with a thickness of 2mm is selected and mechanically polished to make the surface finish reach level IV. Surface treatment was carried out on the polished ZnS base layer, respectively, using acetone, absolute ethanol, and pure water to clean it in ultrasonic waves for 10 minutes. After taking it out, wipe the surface and dry it in an oven at 100°C for 10 minutes. Clean the surface of the dried ZnS base layer, dip a small amount of nano-diamond powder to wipe the surface for 3 minutes, replace the absorbent cotton with absolute ethanol to wipe until the surface is clean, and place it on the sample holder in the chamber of the coating machine.
[0068] 2) Place the coating materials ZnS and YbF3 in molybdenum boats respectively, and place the coating materials Al 2 o 3 Placed in the electron gun crucible. Seal the vacuum chamber and form a vacuum environment. At the same time, open the substrate for heating and baking. The baking temperature is 180°C. ...
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