A telecentric f-theta scanning lens processed by blue laser

Abstract

The invention discloses a telecentric F-Theta scanning lens for blue laser processing. Starting from the laser incident direction, it includes the first lens L1 with focal length f1, the second lens L2 with focal length f2, the third lens L3 with focal length f3, the fourth lens L4 with focal length f4, and the fifth lens with focal length f5 L5, the sixth lens L6 with focal length f6, the total focal length of the objective lens is f. The invention provides a blue laser for the first time, especially a 450nm laser processing telecentric scanning lens, which has the characteristics of short wave, short focal length and large aperture, and the spot size of the entire processing surface reaches the diffraction limit. The invention uses a structure of 6 lenses, which is easy to process while ensuring the performance, and the cost is reasonable. The F‑Theta lens of the present invention can be used in blue laser processing applications, including but not limited to processing applications such as copper precision welding, plastic welding, and additive manufacturing. It can obtain a focused spot with high roundness and uniform size, and makes the processed material Under the guidance of fine laser scribing, a uniformly heated weld pool is formed.

Description

technical field [0001] The invention relates to a laser processing scanning lens, in particular to a blue laser processing telecentric F-Theta scanning lens. Background technique [0002] Flat-field scanning lens (F-Theta lens) For monochromatic light imaging, in laser scanning, negative distortion is used to change the imaging, so that the scanning speed is linearly related to the imaging speed, and its image plane is a plane, requiring the entire image plane The image quality is consistent and reaches the diffraction limit. The lens can be divided into ordinary F-Theta lens and telecentric scanning lens. The telecentric scanning lens places the deflection position of the incident beam at the focal point in front of the object space. The image quality of the upper and outer axes is consistent, and the illumination uniformity is improved, and it is widely used in laser cutting, laser drilling, and laser marking systems. [0003] Traditional laser scanning lenses cover wave...

AI Technical Summary

Problems solved by technology

Even so, in the laser processing of gold, copper, aluminum and other non-ferrous metals, the infrared laser wavelength is not the best working wavelength. Since the basic material absorption of copper at 1064nm is less than 10%, it is a highly reflective material, which is difficult to use Laser processing, and low efficiency

At the same time, due to the low absorption efficiency of the material at 1064nm, it is accompanied by an uneven heating effect during welding applications, which is prone to adverse factors such as welding pool foaming, splashing, and uneven penetration depth, which is not conducive to terminal process applications

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