Micro-electro-mechanical wheel type double-horizontal-axis gyroscope

A dual-level, electric-wheel technology, applied in gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve the problems of device performance impact, large volume, high process compatibility requirements, etc.

Active Publication Date: 2021-04-09
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the large volume of multiple components assembled together, and installation errors, it is difficult to assemble different devices strictly orthogonally, so that the co...

Method used

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  • Micro-electro-mechanical wheel type double-horizontal-axis gyroscope
  • Micro-electro-mechanical wheel type double-horizontal-axis gyroscope
  • Micro-electro-mechanical wheel type double-horizontal-axis gyroscope

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Embodiment Construction

[0013] Such as figure 1 As shown, the micro-electromechanical wheel-type dual-horizontal-axis gyro structure applicable to the present invention consists of an outer frame 101, an outer ring 102, an inner frame 103, an inner ring 104, a central sensitive mass 105, a drive comb 106, and a drive detection comb 107. and connecting beams [108, 110, 113, 114], torsion beams [111, 112], anchor points [109, 115], bottom detection electrodes [401, 402, 403, 403] and substrate 500. The entire structure is axisymmetric about the X-axis and the Y-axis at the same time, that is, it is symmetrical about the geometric center.

[0014] Such as figure 1 , figure 2 , image 3 In the shown wheeled double horizontal axis gyroscope, the outer frame 101 is connected to the anchor point 109 through the driving connecting beam 108, and the driving connecting beam 108 and the anchor point 109 are symmetrically distributed in the center, and the driving connecting beam 108 is generally a folded be...

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Abstract

The invention discloses a micro-electro-mechanical wheel type double-horizontal-axis gyroscope, which is used for detecting rotation around an X axis and a Y axis in a horizontal plane and is characterized by comprising an outer frame, an outer ring, an inner frame, an inner ring, a sensitive mass block, driving comb teeth, driving detection comb teeth, a driving connecting beam, a connecting beam, a torsion beam, a detection electrode, an anchor point and a base; wherein the whole gyro structure is symmetrical about the X-axis and the Y-axis of the device plane simultaneously. The driving comb teeth are connected to the outer frame, the driving detection comb teeth are connected to the inner frame, the outer frame is connected with the anchor points through the driving connecting beams and connected with the outer ring through the connecting beams, and the inner frame is connected with the middle anchor points through the middle connecting beams and connected with the inner ring through the connecting beams; the sensitive mass block is connected with the outer ring through the torsion beam and connected with the inner ring through the torsion beam, the detection electrode is located below the sensitive mass block and fixed to the substrate, and the structural layer is fixedly connected with the substrate through the anchor point.

Description

Technical field: [0001] The invention belongs to the technical field of micro-electromechanical systems, and relates to a micro-electromechanical wheel-type dual-horizontal axis gyroscope, which uses micro-inertial sensor technology. As a micro-inertial device, it is widely used in automobile industry, aerospace, earthquake monitoring, consumer electronics, etc. field. Background technique: [0002] A gyroscope is a device that detects the angular velocity of an object's motion. Micro-electromechanical gyroscopes have the advantages of small size, light weight, low cost, low power consumption, and easy integration. They have been widely used in aviation, aerospace, weapons, automobiles, and consumer electronics. [0003] The inertial measurement unit (IMU) is a unit composed of a single-axis, two-axis or three-axis gyroscope and an accelerometer. It can simultaneously measure the acceleration and angular velocity of the three orthogonal axes of the object. After a series of...

Claims

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Application Information

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IPC IPC(8): G01C19/5712
CPCG01C19/5712
Inventor 赵前程杨海兵崔健
Owner PEKING UNIV
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