The invention discloses a spherical surface
standing wave three-dimensional procession effect three-axis integrated miniature
gyroscope spherical shell
resonance structure, the structure comprises a spherical
harmonic oscillator, a plurality of electrodes and a shell, and the electrodes are used for measuring the vibration mode of the spherical
harmonic oscillator to realize the measurement of the
angular velocity of three-axis rotation; a supporting column is arranged in the center of the spherical
harmonic oscillator, an inner spherical shell is arranged on the outer layer of the spherical
harmonic oscillator, the supporting column comprises a plurality of U-shaped supporting beams, an anchor area sphere and a base, the inner spherical shell is constructed to be in a thickness non-uniform distribution form, and the lower end of the inner spherical shell is provided with a hole structure for the supporting column to penetrate through. Wherein the lower boundary of the hole is overlapped with the upper boundary of the base. The electrodes are arranged on the outer side of the spherical
harmonic oscillator, a gap between the outer wall of the spherical
harmonic oscillator and the inner wall of each
electrode is a
capacitance gap, the electrodes are arranged around the
equator of the spherical harmonic oscillator every 45 degrees, the electrodes are arranged at the 45-degree positions of an upper hemisphere and a lower hemisphere every 90 degrees, and the electrodes are embedded in the upper face of the shell. The three-axis
angular velocity measuring device has the remarkable effects that the structure is simple, the space limitation of two-dimensional
precession of a traditional hemispherical resonant
gyroscope is broken through, and the three-axis
angular velocity measurement is realized under a single structure by utilizing the space
precession characteristic of spherical harmonic standing
waves under the action of multi-degree-of-freedom
inertia force.