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Acceleration sensor and electronic equipment

An acceleration sensor and density technology, applied in the field of sensors, can solve the problems of large chip area and high production cost, and achieve the effects of reducing chip area, miniaturization, and cost reduction

Pending Publication Date: 2021-04-30
MEMSENSING MICROSYST SUZHOU CHINA
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Existing MEMS acceleration sensors have problems such as large chip area and high production cost

Method used

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  • Acceleration sensor and electronic equipment
  • Acceleration sensor and electronic equipment
  • Acceleration sensor and electronic equipment

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Embodiment Construction

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some, not all, embodiments of the application.

[0025] Existing acceleration sensors generally have the problems of large chip area and high manufacturing cost, especially Z-axis acceleration sensors. A general Z-axis acceleration sensor is provided with a beam, and the two sides of the beam are two parts with the same material but different areas, and the distances from the center of mass of the two parts to the beam are not equal. Using the eccentric mass of one part can cause the two parts to twist about the beam, and based on the twist of the two parts, the acceleration in the Z axis can be detected. This kind of acceleration sensor usually has a large chip area, and due to the asymmetry of the two parts with different areas on both sides ...

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Abstract

The invention provides an acceleration sensor and electronic equipment. The acceleration sensor comprises a substrate; a mass block which comprises a first region and a second region, wherein the area of the first region is equal to the product of the area of the second region, the mass of the first region and the distance from the mass center of the first region to the boundary between the first region and the second region, the mass block is not equal to the product of the mass of the second region and the distance from the mass center of the second region to the boundary line, is movably connected with the substrate, and can twist around the boundary line. According to the acceleration sensor provided by the embodiment of the invention, the chip area can be significantly reduced, and the cost is reduced.

Description

technical field [0001] The present application relates to the field of sensors, in particular to an acceleration sensor and electronic equipment. Background technique [0002] Micro-Electro-Mechanical System (MEMS) acceleration sensors are widely used in driving, medical and other fields due to their small size, light weight, low cost, easy integration and intelligent realization. Existing MEMS acceleration sensors have problems such as large chip area and high manufacturing cost. Contents of the invention [0003] In view of this, the embodiments of the present application provide an acceleration sensor and an electronic device, which can significantly reduce chip area and cost. [0004] In a first aspect, the present application provides an acceleration sensor, including: a substrate; a mass block, wherein the mass block includes a first area and a second area, the area of ​​the first area is equal to the area of ​​the second area, and the area of ​​the first area The ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/08G01P15/125
CPCG01P15/08G01P15/125G01P2015/0862
Inventor 庄瑞芬李刚
Owner MEMSENSING MICROSYST SUZHOU CHINA
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