Gas path diagram implementation method and device based on IAP platform
A realization method, gas circuit technology
Pending Publication Date: 2021-05-04
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
[0004] One or more embodiments of the present invention provide a method and device for realizing a gas circuit diagram based on an IAP platform to solve the problem that it is difficult to change the gas circuit diagram in time in the existing gas circuit diagram implementation method
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Embodiment Construction
[0023] One or more embodiments of the present invention provide a method and device for realizing a gas circuit diagram based on an IAP platform to solve the problem that it is difficult to change the gas circuit diagram in time in the existing gas circuit diagram implementation method.
[0024] In order to enable those skilled in the art to better understand the technical solutions in one or more embodiments of the present invention, the following will describe the technical solutions in one or more embodiments of the present invention in conjunction with the drawings in one or more embodiments of the present invention The technical solution is clearly and completely described, and obviously, the described embodiments are only some embodiments of the present invention, rather than all the embodiments. Based on one or more embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the p...
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One or more embodiments of the invention disclose a gas path diagram implementation method and device based on an IAP platform. The method and device are used for solving the problem that a gas path diagram is difficult to change in time in an existing gas path diagram implementation mode. The method comprises the steps of receiving a drawing request for the gas path diagram, wherein the drawing request carries file identification information of an editable file corresponding to the gas path diagram; based on the file identification information, reading the editable file, and obtaining attribute information of each target control in the gas path diagram stored in the editable file and an association relationship between the attribute information of each target control and control data in the IAP platform; according to the association relationship, obtaining control data corresponding to the attribute information of each target control from the IAP platform; and according to the attribute information of each target control, generating a gas path diagram on the gas path diagram editing interface, and displaying the attribute information of each target control and / or corresponding control data on the gas path diagram. According to the scheme, timely change of the gas path diagram can be ensured.
Description
technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a method and device for realizing an air circuit diagram based on an IAP platform. Background technique [0002] The gas circuit diagram is an indispensable part of the semiconductor manufacturing equipment control software system, and it can feed back the process gas circuit status of a semiconductor manufacturing equipment in a relatively intuitive form. Since semiconductor manufacturing equipment produces different products, the corresponding process gas paths have certain differences. As more and more products are developed, in order to respond to hardware changes related to the process gas path of semiconductor manufacturing equipment in a timely manner, The design of the gas circuit diagram puts forward the requirement of rapid iteration. [0003] The existing gas path diagram adopts the program interface design method, and the process gas path that nee...
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Login to View More IPC IPC(8): G06F30/12G06F111/20
CPCG06F30/12G06F2111/20
Inventor 肖托黄扬君刘建涛刘耀琴
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD