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Monitoring system and method of semiconductor test equipment

A technology for testing equipment and monitoring systems, applied in general control systems, control/regulation systems, program control, etc., can solve problems such as inconvenient monitoring and troublesome maintenance, and achieve the effects of reducing potential safety hazards, reducing development, and improving stability

Inactive Publication Date: 2021-05-14
杭州加速科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides a monitoring system and method for semiconductor testing equipment, which solves the problems of inconvenient monitoring and troublesome maintenance of semiconductor testing equipment in the prior art, and realizes real-time monitoring of the equipment

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  • Monitoring system and method of semiconductor test equipment
  • Monitoring system and method of semiconductor test equipment

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Embodiment Construction

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0026] In addition, the term "and / or" in this article is only an association relationship describing associated objects, which means that there may be three relationships, for example, A and / or B, which may mean: A exists alone, A and B exist at the same time, There are three cases of B alone. In addition, the character " / " in this article genera...

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Abstract

The invention provides a monitoring system for semiconductor test equipment. The system comprises: an industrial personal computer / upper computer used for transmitting a monitoring data packet to a cascade card and receiving alarm information fed back from the cascade card; a cascade card used for distributing the received monitoring data packet to each main control board and receiving alarm information fed back by each main control board; a main control board used for distributing the monitoring data packet of the cascade card to each service board and receiving alarm information of each service board; and the service boards for monitoring the state of each module through a FPGA production monitoring package module. The monitoring system has the advantages that the problems that in the prior art, semiconductor testing equipment is inconvenient to monitor, troublesome to maintain and the like are solved, state information of the equipment can be obtained at any time, and real-time monitoring of the equipment is achieved.

Description

technical field [0001] The invention belongs to the technical field of monitoring of semiconductor testing equipment, and in particular relates to a monitoring system and method of semiconductor testing equipment. Background technique [0002] In the existing technology, if there is a problem with the semiconductor test equipment, timely feedback is required so as not to affect the accuracy of the test results. However, the existing maintenance is cumbersome and inconvenient, and it is impossible to obtain equipment status information at any time and monitor the equipment in real time. Contents of the invention [0003] The invention provides a monitoring system and method for semiconductor testing equipment, which solves the problems of inconvenient monitoring and troublesome maintenance of semiconductor testing equipment in the prior art, and realizes real-time monitoring of the equipment. [0004] In the first aspect of the present invention, a monitoring system for sem...

Claims

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Application Information

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IPC IPC(8): G05B19/418
CPCG05B19/4185G05B2219/31088Y02P90/02
Inventor 凌云周辉
Owner 杭州加速科技有限公司
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