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Detection method and detection device of gas transmission equipment and gas transmission equipment

A detection method and gas transmission technology, which are used in measurement devices, fluid tightness testing, and machine/structural component testing, etc., can solve the problems of high detection cost and cumbersome detection items of gas transmission equipment, and achieve high detection efficiency, The effect of improving reliability and process yield, increasing accuracy and timeliness

Active Publication Date: 2021-06-04
CHANGXIN MEMORY TECH INC
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Problems solved by technology

[0006] The purpose of the present disclosure is to provide a detection method and detection device, which are used to overcome the problems of cumbersome detection items and high detection cost of gas transmission equipment in the semiconductor manufacturing process caused by the limitations and defects of related technologies at least to a certain extent

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  • Detection method and detection device of gas transmission equipment and gas transmission equipment
  • Detection method and detection device of gas transmission equipment and gas transmission equipment
  • Detection method and detection device of gas transmission equipment and gas transmission equipment

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Embodiment Construction

[0032]Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of the specific details being omitted, or other methods, components, devices, steps, etc. may be adopted. In other instances, well-known technical solutions...

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Abstract

The invention provides a detection method and detection device of gas transmission equipment and the gas transmission equipment. The detection method includes the steps of controlling an air inlet of a machine flow control device to be connected with a first air inlet pipeline, and controlling an air inlet valve of the air inlet to be opened and a gas transmission valve of the machine flow control device to be closed; controlling an air exhaust valve of the machine flow control device to be opened, and controlling the air exhaust valve to be closed after the flow of first gas passing through a mass flow controller in the machine flow control device reaches a preset target value; acquiring a first flow minimum value of the first gas passing through the mass flow controller within a first preset duration; and determining a valve leakage detection result, an air inlet pipeline blockage detection result and a mass flow controller installation direction detection result of the machine flow control device according to the first flow minimum value. According to the embodiment of the detection method and detection device of the gas transmission equipment and the gas transmission equipment, the three detection results of the gas transmission equipment can be obtained through one-time detection.

Description

technical field [0001] The present disclosure relates to the technical field of semiconductor manufacturing, and in particular, to a detection method, a detection device, and a gas transmission device for gas transmission equipment. Background technique [0002] In the manufacturing process of semiconductor memory devices, thin film deposition techniques need to be frequently applied. Thin film deposition techniques generally include PVD (Physical Vapor Deposition, physical vapor deposition), CVD (Chemical Vapor Deposition, chemical vapor deposition). In the chemical vapor deposition process, the factory provides the special gas cylinders required for the process reaction, so that the gas in the gas cylinders flows through the gas cabinet (Gas Cabinet) and pipelines to the mass flow controller (MassFlow Controller, MFC), and then to the distribution plate (showerhead) enters the reaction chamber to participate in the reaction for thin film deposition. [0003] Mass Flow Co...

Claims

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Application Information

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IPC IPC(8): C23C16/52C23C16/455G01M3/28
CPCC23C16/52C23C16/455G01M3/2876G01M3/2807
Inventor 顾瑶
Owner CHANGXIN MEMORY TECH INC
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