Electrothermal micromirror driver mismatch correction system and method
An electrothermal micromirror and driver technology, applied in circuits, discharge tubes, electrical components, etc., can solve the problems of reduced interference modulation degree, reduced interference fringe contrast, and optical path misalignment.
Active Publication Date: 2022-03-18
XIAMEN UNIV
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[0005] If there is a scanning inclination during the vertical scanning movement of the micromirror, it will directly lead to misalignment of the optical path, a decrease in the degree of interference modulation, and a decrease in the contrast of interference fringes, which will limit the utilization of the maximum scanning displacement of the moving mirror and cause a decrease in system resolution. If the inclination is too large , causing the moving mirror spot and the fixed mirror spot to separate from each other, and the interference signal at the detector end disappears
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[0077] The present disclosure will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific implementation manners described here are only used to explain relevant content, rather than to limit the present disclosure. It should also be noted that, for ease of description, only parts related to the present disclosure are shown in the drawings.
[0078] It should be noted that, in the case of no conflict, the implementation modes and the features in the implementation modes in the present disclosure can be combined with each other. The technical solutions of the present disclosure will be described in detail below with reference to the accompanying drawings and in combination with implementation manners.
[0079] Unless otherwise specified, the illustrated exemplary embodiments / embodiments are to be understood as exemplary features providing various details of some manner in which the technical idea of the pre...
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The present disclosure provides an electrothermal micromirror driver mismatch correction system, including: a light source, the light source is used to emit light to the electrothermal micromirror arranged directly above the light source, and the electrothermal micromirror reflects the light from the light source to form reflected light; Multiple photodetectors are evenly arranged around the light source, and multiple photodetectors respectively detect the reflected light formed by the electrothermal micromirror to generate multiple current signals; the correction circuit receives multiple current signals at the same time, and converts multiple current signals to Convert to a plurality of voltage signals, obtain the difference between the maximum value and the minimum value of the multiple voltage signals, and at least generate a corrected electrical signal based on the difference, and the corrected electrical signal can be sent to at least one driver of the electrothermal micromirror for at least The drive voltage of a driver is corrected. The disclosure also provides a mismatch correction method for the electrothermal micromirror driver.
Description
technical field [0001] The disclosure belongs to the technical field of electrothermal micromirror drive control, and particularly relates to an electrothermal micromirror driver mismatch correction system and a electrothermal micromirror driver mismatch correction method. Background technique [0002] The electrothermal micromirror relies on the thermal expansion effect of the object to drive the micromirror to deflect. [0003] When the temperature changes, the length and volume of the object will also change, so that the output force or displacement will deform the micromirror structure. [0004] Scanning micromirrors (SEM) are mostly used in optical systems such as various displays, optical communications, and target recognition, requiring the micromirror to have a large vertical displacement and scanning angle. [0005] If there is a scanning inclination during the vertical scanning movement of the micromirror, it will directly lead to misalignment of the optical path,...
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IPC IPC(8): H01J37/244H01J37/26H01J37/28
CPCH01J37/244H01J37/28H01J37/265
Inventor 程翔邓晨洋徐顺严旭杰
Owner XIAMEN UNIV