Test system device and test method for absorption spectrum of micron-sized sample on transparent substrate

Abstract

The invention provides a test system device and test method for the absorption spectrum of a micron-sized sample on a transparent substrate. The test method comprises the following steps of: respectively imaging the transparent substrate, a to-be-tested sample and air and sampling spectra to obtain the transmitted light intensity of three types of test samples; and calculating the absorptivity and absorbance of the to-be-tested sample according to the transmitted light intensity of the three types of test samples. According to the method, an imaging process comprises the steps that: an imaging light source and a detection light source are started;detection light emitted by the detection light source sequentially penetrates through a lens, a small hole and a beam shrinking objective lens to irradiate the test samples to form light spots, imaging light emitted by the imaging light source irradiates the surfaces of the test samples to be reflected, and the reflected light is collected by the imaging objective lens and then sent into a photosensitive element to image the light spots; and the distance between the lens and the small hole is adjusted, so that the diameter of the imaged light spots is less than or equal to 4 microns. A spectrum sampling process comprises the following steps that: the detection light source is started, detection light emitted by the detection light source sequentially penetrates through the lens, the small hole and the beam shrinking objective lens to irradiate the surfaces of the test samples to be transmitted, and the transmitted light is sent into a spectrograph through the imaging objective lens for spectrum sampling.

Description

technical field [0001] The invention belongs to the technical field of spectrum testing, and relates to a test system device and a test method for absorption spectrum, in particular to a test system device and test method for the absorption spectrum of a micron-scale sample on a transparent substrate. Background technique [0002] In recent years, with the rapid development of micro-nano processing technology, the size of microelectronic devices has been reduced day by day, and the design of fine feature structures on nanomaterials has become a research hotspot in today's micro-nano electronic devices. The characterization of the basic optical properties of nanomaterials and micro-nano structures (such as absorption spectra) is the basis for understanding various physical phenomena of nanomaterials, and it can also characterize the performance of micro-nano devices constructed of nanomaterials. [0003] CN210803269U discloses a kind of in-situ high-pressure absorption spectr...

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Problems solved by technology

[0005] Due to the boundary effect of nanomaterials, when the size of the probe beam is larger than the nanomaterial, the edge of the nanomaterial will scatter the beam significantly. The macroscopic measurement method is less affected by the scattering effect, but it is only suitable for samples that are a single material and sens

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