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Compact differential type flexible displacement reduction mechanism

A displacement reduction, differential technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electromechanical device, etc., can solve the problem of low positioning accuracy, achieve simple structure, improve Resolution and accuracy, effects of large displacement reduction ratios

Inactive Publication Date: 2021-06-22
XI AN JIAOTONG UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a compact differential flexible displacement reduction mechanism to solve the problem of low positioning accuracy in existing positioning methods

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  • Compact differential type flexible displacement reduction mechanism
  • Compact differential type flexible displacement reduction mechanism
  • Compact differential type flexible displacement reduction mechanism

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Embodiment Construction

[0024] The present invention is further described below in conjunction with accompanying drawing:

[0025] see Figure 1 to Figure 5 , a compact differential flexible displacement reduction mechanism, including an outer flexible branch chain module 1, an inner flexible branch chain module 2, a rigid connection block 3, a fixed block 4, an output block 5 and a driver 6; the driver is arranged on two rigid Between the connection blocks; one end of the two outer flexible branch chain modules is respectively connected to the rigid connection block, and the other end is connected to the fixed block; one end of the two inner flexible branch chain modules is respectively connected to the two rigid connection blocks, and the other end connected to the output block.

[0026] The outer flexible branch chain module and the inner flexible branch chain module may contain one or more parallel branch chains, and the outer flexible branch chain module and the inner flexible branch chain modu...

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Abstract

A compact differential type flexible displacement reduction mechanism comprises outer flexible branch chain modules, an inner flexible branch chain module, rigid connecting blocks, a fixing block, an output block and a driver. The driver is arranged between the two rigid connecting blocks; one ends of the two outer flexible branch chain modules are respectively connected to the rigid connecting block, and the other ends of the two outer flexible branch chain modules are connected to the fixed block; one ends of the two inner flexible branch chain modules are connected to the two rigid connecting blocks respectively, and the other ends of the two inner flexible branch chain modules are connected to the output block. Differential superposition of displacement is achieved through combination of the four flexible branch chain modules, a large displacement reduction ratio can be obtained, and therefore the resolution ratio and precision of motion are greatly improved. The compact differential type flexible displacement reduction mechanism can be matched with a macro-motion platform, and large-range and ultrahigh-precision motion positioning is achieved.

Description

technical field [0001] The invention belongs to the field of precision drive and transmission, in particular to a compact differential flexible displacement reduction mechanism. Background technique [0002] Nanopositioning technology is the basis for nanomanipulation and nanometering. Generally, the piezoelectric stack driver is used to directly drive the positioning, or the position is further amplified by using a displacement amplification mechanism (such as bridge or lever type) on the basis of the piezoelectric stack driver. This kind of positioning method usually only reaches tens of nanometers or even Motion accuracy of hundreds of nanometers. [0003] With the development of science and technology, fields such as semiconductor technology, aerospace technology, optics and optoelectronic engineering, and bioengineering have put forward higher and higher requirements for positioning accuracy. Taking the lithography machine as an example, the workpiece table with ultra...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/04H02K41/035
CPCH02N2/043H02K41/0356
Inventor 陈贵敏吴厚旗
Owner XI AN JIAOTONG UNIV