Bridge type differential flexible displacement reduction mechanism
A displacement reduction and flexible technology, applied in optomechanical equipment, optics, instruments, etc., can solve problems that can only reach tens of nanometers or even hundreds of nanometers, and achieve the effect of simple structure, improved resolution and precision
Inactive Publication Date: 2021-05-28
XI AN JIAOTONG UNIV
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Problems solved by technology
Generally, the piezoelectric stack driver is used to directly drive the positioning, or the position is further amplified by using a displacement amplification mechanism (such as bridge or lever type) on the basis of the piezoelectric stack driver. This kind of positioning method usually only reaches tens of nanometers or even Motion accuracy of hundreds of nanometers
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[0044] exist figure 1 In the embodiment, in order to make the structure more compact and simple, and also to reduce the structural weight, a concentrated flexibility flexible branch chain is connected to both ends of the middle block in the two half-bridge flexible modules. During the working process, by changing the voltage on the piezoelectric stack driver 4, the piezoelectric driver 4 produces an X-direction displacement. When the voltage increases, the piezoelectric stack driver 4 produces an X-direction elongation movement. When the voltage decreases, The piezoelectric stack driver 4 produces the X-direction retraction motion. The X-direction displacement drives the two rigid connection blocks 3 connected to the piezoelectric stack driver to generate X-direction displacement, and the X-direction displacement drives the fixed half-bridge flexible amplification module 1 and the movable half-bridge flexible amplification module 2 connected to the rigid connection blocks The...
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A bridge type differential flexible displacement reduction mechanism comprises a fixed half-bridge flexible module, a movable half-bridge flexible module, a rigid connecting block and a driver. The fixed half-bridge flexible module and the movable half-bridge flexible module are arranged between the two rigid connecting blocks to form an annular frame, and the driver is arranged between the two rigid connecting blocks in the annular frame; the bending directions of the fixed half-bridge flexible module and the movable half-bridge flexible module are the same; differential superposition of displacement is achieved through combination of the two half-bridge flexible modules, a large displacement reduction ratio can be obtained, and therefore the resolution ratio and precision of motion are greatly improved; and the bridge type differential flexible displacement reduction mechanism can be matched with a macro-motion platform, and large-range and ultrahigh-precision motion positioning is achieved.
Description
technical field [0001] The invention belongs to the field of precision drive and transmission, in particular to a bridge-type differential flexible displacement reduction mechanism. Background technique [0002] Nanopositioning technology is the basis for nanomanipulation and nanometering. Generally, the piezoelectric stack driver is used to directly drive the positioning, or the position is further amplified by using a displacement amplification mechanism (such as bridge or lever type) on the basis of the piezoelectric stack driver. This kind of positioning method usually only reaches tens of nanometers or even Motion accuracy of hundreds of nanometers. [0003] With the development of science and technology, fields such as semiconductor technology, aerospace technology, optics and optoelectronic engineering, and bioengineering have put forward higher and higher requirements for positioning accuracy. Taking the lithography machine as an example, the workpiece table with u...
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IPC IPC(8): G03F7/20
CPCG03F7/70725G03F7/70758
Inventor 陈贵敏吴厚旗
Owner XI AN JIAOTONG UNIV