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Subwavelength grating-based ultra-sensitive refractive index optical biosensor

A subwavelength grating and refractive index technology, applied in the field of biosensors, can solve the problems of complex structure and expensive detection equipment, and achieve the effect of improving sensitivity

Active Publication Date: 2021-09-21
TAIYUAN UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Problems solved by technology

In addition, due to the drastic phase variation around the guided mode resonance, highly sensitive sensors based on phase detection can also be realized, but at the cost of complex structure and expensive detection equipment

Method used

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Embodiment Construction

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, rather than All the embodiments; based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts all belong to the protection scope of the present invention.

[0021] like figure 1 As shown, the embodiment of the present invention provides a kind of ultrasensitive refractive index photobiosensor based on subwavelength grating, comprises quartz substrate 1 and the gold film 3 that is arranged on quartz substrate 1 successively, fluorine-containing polymer Cytop thin film layer 4 and a grating waveguide layer 5, the grating waveguide layer 5 is a surface relief gra...

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Abstract

The invention belongs to the field of biosensors, and particularly relates to a subwavelength grating-based ultra-sensitive refractive index optical biosensor which comprises a quartz substrate, and a gold film, a fluorine-containing polymer Cytop film layer and a grating waveguide layer which are sequentially arranged on the quartz substrate. The grating waveguide layer is a surface relief grating structure made of a silicon nitride material. And a liquid sample to be detected covers the grating waveguide layer. According to the invention, the fluorine-containing polymer Cytop film is inserted between the grating and the metal film, the extremely narrow full width at half maximum of guided-mode resonance is realized, and calculation shows that the thickness of the film is changed, the influence on an incident resonance angle is small, but the full width at half maximum can be greatly improved and is about 0.0005 degrees, and the refractive index change is-4 * 10 <-5 >so that the sensitivity of the sensor can be greatly improved.

Description

technical field [0001] The invention belongs to the field of biosensors, and in particular relates to an ultrasensitive refractive index photobiological sensor based on a subwavelength grating. Background technique [0002] The high-sensitivity optical refractive index sensor has the characteristics of wavelength division multiplexing, anti-electromagnetic interference, no need for special labels, real-time, non-contact, non-destructive measurement, etc. It is useful in exploring the antibody-antigen interaction of low molecular weight substances such as glucose and biotin , adenine, thymine, and the binding reactions between complementary DNA strands are very useful in the field of biochemistry. In recent decades, with the development of micro-nano fabrication technology, many photobiosensors, such as surface plasmon resonance (SPR) sensors, guided mode resonance (GMR) sensors, etc. have been proposed and have been greatly developed. [0003] Among them, the surface plasmo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41G01N21/01
CPCG01N21/41G01N21/01G01N2021/0112
Inventor 李旭峰赵亚丽刘成林杜建功杨扉王欣
Owner TAIYUAN UNIVERSITY OF SCIENCE AND TECHNOLOGY
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