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Scanning electron microscope having detachable shaft, and image acquisition method using same

An electron microscope and image acquisition technology, applied in circuits, discharge tubes, electrical components, etc., can solve the problems of rising maintenance time and costs, waste of preparation time, and time-consuming, shortening preparation time, and facilitating maintenance and management. Effect

Pending Publication Date: 2021-10-19
COXEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, there are simple axis-related corrections, wave velocity offsets, replacement of consumables, etc., which also require professional assistance, resulting in increased maintenance time and costs.
[0007] In addition, it takes time to form a high vacuum inside the shaft, so there is a problem that it takes a lot of work preparation time

Method used

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  • Scanning electron microscope having detachable shaft, and image acquisition method using same
  • Scanning electron microscope having detachable shaft, and image acquisition method using same
  • Scanning electron microscope having detachable shaft, and image acquisition method using same

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Embodiment Construction

[0036] The present invention will be specifically described below with reference to the accompanying drawings. First of all, the terms or words used in this specification and claims should not be limited to the general meaning or the meaning in the dictionary, but should be interpreted based on the principle that the inventor can properly define the concept of the term in order to explain his invention in the best way. Meanings and concepts consistent with the technical thought of the present invention. Therefore, the embodiments described in this specification and the structures shown in the drawings are only embodiments of the present invention, and do not fully represent the technical idea of ​​the present invention. Therefore, it should be understood that there may be many equivalents that can replace these at the time of this application. and modification examples.

[0037] As mentioned above, the axis is the core of the electron microscope, and the design and manufactur...

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Abstract

A scanning electron microscope according to the present invention enables a shaft to be detached from a sample installation unit, thereby addressing issues related to the shaft, such as simple calibration related to the shaft, misalignment of a beam speed, replacement of consumables, etc., by replacing the entire shaft. As such, the scanning electron microscope has the advantage of being simply and easily repaired and maintained.

Description

technical field [0001] The present invention relates to a scanning electron microscope, and more specifically relates to a scanning electron microscope which can be assembled and disassembled so as to be convenient, easy to maintain and manage. [0002] Moreover, the present invention also includes an image acquisition method using such a scanning electron microscope. [0003] This application claims the priority of Korean Patent Application No. 10-2019-0033312 (Title of Invention: Scanning Electron Microscope with Detachable Shaft and Image Acquisition Method Using It, Filed on March 25, 2019), Korean Patent Application All the contents contained in the application specification and drawings of No. 10-2019-0033312 are included in this specification. Background technique [0004] Generally, a scanning electron microscope scans an electron beam onto a sample and detects secondary electrons or back scattered electrons generated on the sample to obtain an image of the sample t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/10H01J37/20H01J37/244H01J37/28
CPCH01J37/10H01J37/244H01J37/28H01J37/20H01J2237/164H01J2237/024H01J37/16H01J2237/2801
Inventor 李俊熙
Owner COXEM CO LTD
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