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MEMS silicon-based atomization core and manufacturing method thereof

A manufacturing method and atomizing core technology, applied in the direction of tobacco, etc., can solve the problems of dry burning carbonization, inconsistent porous aperture of ceramic atomizing core, uneven heating, etc., and achieve high atomization uniformity, good atomization consistency, Reduce the effect of local overheating and dry burning

Pending Publication Date: 2021-11-19
美满芯盛(杭州)微电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a MEMS silicon-based atomizing core and its manufacturing method in order to solve the problems of uneven heating and local overheating and carbonization caused by the inconsistency of the porous aperture of the ceramic atomizing core.

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  • MEMS silicon-based atomization core and manufacturing method thereof
  • MEMS silicon-based atomization core and manufacturing method thereof
  • MEMS silicon-based atomization core and manufacturing method thereof

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Embodiment Construction

[0038] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations.

[0039] Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art wi...

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Abstract

The invention discloses an MEMS silicon-based atomization core which comprises a first substrate and a second substrate. The first substrate is provided with a plurality of atomization holes, the atomization holes penetrate through the first substrate, one side of the first substrate is provided with a transverse micro-channel liquid storage cabin, the atomization holes are all communicated with the transverse micro-channel liquid storage cabin, the other side of the first substrate is provided with a metal electrode, and the metal electrode is connected with a resistance wire; and the second substrate is connected to the first substrate, a plurality of through holes are formed in the second substrate, the through holes penetrate through the upper surface and the lower surface of the second substrate, the through holes are communicated with the transverse micro-channel liquid storage cabin, and the through holes and the atomization holes are arranged in a staggered mode. The invention further discloses a manufacturing method of the MEMS silicon-based atomization core. The problems of nonuniform heating and local overheating, dry burning and carbonization caused by inconsistent pore diameters of multiple pores of the ceramic atomization core can be solved.

Description

technical field [0001] The invention belongs to the technical field of liquid heating atomizing cores, and in particular relates to a MEMS silicon-based atomizing core and a manufacturing method thereof. Background technique [0002] As the core component of the liquid vaporization device, the heat-generating atomizing element heats the liquid and turns it into mist-like aerosol, which is inhaled by the user. In order to ensure a good taste for the smoker, it is required that the atomization element heat the atomized liquid to be fast, uniform, consistent, delicate and minimize the generation of harmful substances. [0003] The existing ceramic atomizing core, because it is prepared by porous ceramic sintering technology, cannot prepare a structure with uniform pore diameter, which easily causes uneven liquid atomization, local overheating and carbonization blockage. Moreover, due to the poor thermal conductivity of ceramics, the atomization speed is slow, which further agg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A24F40/10A24F40/46A24F40/40A24F40/42
CPCA24F40/10A24F40/46A24F40/40A24F40/42
Inventor 王敏锐
Owner 美满芯盛(杭州)微电子有限公司
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