Third-generation semiconductor crystal growth furnace production data acquisition method and related equipment
A technology of production data and collection method, which is applied in the field of production data collection of third-generation semiconductor crystal growth furnaces, and can solve the problems of many factors affecting data collection, difficult equipment data collection, and large data volume.
Pending Publication Date: 2022-01-04
GALLIUM ADVANCE SEMICON TECH CO
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Problems solved by technology
[0003] The main purpose of the present invention is to provide a third-generation semiconductor crystal growth furnace production data acquisition method and related equipment, aiming to solve the technical problem that the equipment data acquisition has many influencing factors and the amount of data is large, making it difficult to collect data from the equipment.
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[0062] The embodiment of the present invention provides a third-generation semiconductor crystal growth furnace production data collection method, device, equipment, and storage medium. It causes technical problems that are difficult to collect from production equipment.
[0063] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present invention and the above drawings are used to distinguish similar objects, and not necessarily Used to describe a specific sequence or sequence. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments described herein can be practiced in sequences other than those illustrated or described herein. Furthermore, the term "comprising" or "having" and any variations thereof, are intended to cover a non-exclusive inclusion, for example, a process, method, system, product or device comprising a sequence of steps or elements is not neces...
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The invention relates to the technical field of industrial data acquisition, and discloses a third-generation semiconductor crystal growth furnace production data acquisition method and related equipment. The acquisition method comprises the following steps: shooting an output screen, used for outputting growth record data, of crystal growth furnace growth equipment, thereby obtaining video stream data containing display content of the output screen; performing video decoding on the video stream data in real time to obtain image data containing the display content of the output screen; performing character recognition on the image data according to a preset character recognition sequence to obtain crystal growth furnace production data displayed by the output screen; and according to a preset record format, assembling the crystal growth furnace production data to obtain a plurality of crystal growth furnace production records with a growth time sequence. According to the invention, data acquisition of industrial field equipment is realized, and meanwhile, a data source is provided for a production management system of an enterprise.
Description
technical field [0001] The invention relates to the technical field of industrial data collection, in particular to a method for collecting production data of a third-generation semiconductor crystal growth furnace and related equipment. Background technique [0002] The third-generation semiconductors produce crystals in a closed crystal growth furnace with a temperature of more than 1000 degrees in the furnace. Due to the high temperature in the furnace and the closed type, it is not conducive for the staff to observe the production status in real time. If there is an abnormality during production, It is also impossible to detect and take countermeasures in time. Therefore, various data during the production of crystal growth furnace equipment are collected and provided to the staff for analysis, so as to understand the crystal growth status in the crystal growth furnace. However, the current industrial data protocol is not standard, and the amount of data is large, and th...
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IPC IPC(8): H04N7/18C30B15/00G06N3/04G06N3/08
CPCH04N7/18C30B15/00G06N3/08G06N3/045
Inventor 唐山河黄正凯
Owner GALLIUM ADVANCE SEMICON TECH CO