Vacuum coating device with air cushion buffer cavity
A technology of vacuum coating and buffer chamber, which is applied in the directions of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., and can solve the problems of uniform coating and non-display coating, etc.
Pending Publication Date: 2022-01-21
BAOSHAN IRON & STEEL CO LTD
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Problems solved by technology
[0011] The above-mentioned patents all involve the specific form of nozzles in the coating process, but it does not show that the coatings performed by these nozzles can reach a uniform degree, and the uniformity of the coating on the surface of the steel plate is of great importance to its subsequent bending and stamping. has a very important factor
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[0067] The surface of steel plate 25 is used for evaporating zinc. The width of steel plate 25 is 1100mm. After cleaning and drying steel plate 25, steel plate 25 is heated to 120°C. Crucible 13 adopts induction heater 16 heating to evaporate zinc, and makes the zinc vapor pressure in crucible 13 reach 10000Pa pressure by controlling power, and now pressure regulating valve 24 is in closed state. When the gas pressure in the crucible 13 reaches 10000Pa, the pressure regulating valve 24 is opened, and the metal vapor 15 enters the flow distribution box 17 through the metal vapor pipeline 23, and the pressure stabilizing plate 18 and the flow suppression plate 19 are arranged in the flow distribution box 18.
[0068] The damper 19 adopts a rectangle, wherein L / d=2, H=3L.
[0069] The voltage stabilizing plate 18 is set as a porous structure, S 孔隙总面积 / S 出口 =3.
[0070] The internal working pressure of the coating nozzle 22 is 5000Pa, the material of the coating nozzle 22 is gr...
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The invention discloses a vacuum coating device with an air cushion buffer cavity. The vacuum coating device comprises a crucible, an induction heater used for heating molten metal in the crucible to form metal steam is arranged at the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a metal steam pipeline, a horizontal pressure stabilizing plate is arranged in the flow distribution box body, vertical flow suppression plates are arranged at the top in the flow distribution box body, the pressure stabilizing plate is located below the flow suppression plate, the top of the flow distribution box body is connected with a coating nozzle, and a pressure regulating valve is arranged on the metal steam pipeline; the pressure stabilizing plate is of a porous structure, and the ratio of the total pore area S<total pore area> of the pressure stabilizing plate to the outlet position area S<outlet> of the coating nozzle is larger than or equal to 0.1, namely, the ratio of the S<total pore area> to the S<outlet> is larger than or equal to 0.1; and the two flow suppression plates are symmetrically located at the two sides of the coating nozzle respectively. By means of the vacuum coating device, when high-temperature steam is in contact with a low-temperature steel plate, a uniform coating is formed on the surface of the steel plate.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, more specifically, to a vacuum coating device with an air cushion buffer chamber. Background technique [0002] Physical vapor deposition (PVD) refers to the process of heating the metal to be plated under vacuum conditions to deposit it on the substrate in a gaseous state to form a coating. According to different heating methods, it is divided into electric heating (resistance or induction) and electron beam gun heating (EBPVD). Vacuum coating, as a surface modification and coating process, has been widely used in electronics, glass, plastics and other industries. The main advantages of vacuum coating technology lie in its environmental protection, good coating performance and the diversity of materials that can be plated. The key to applying vacuum coating technology to continuous strip steel lies in the aspects of continuous coating production, large area, high speed, and large-scale p...
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IPC IPC(8): C23C14/26C23C14/16
CPCC23C14/26C23C14/16
Inventor 李山青任三兵樊俊飞
Owner BAOSHAN IRON & STEEL CO LTD