Vacuum coating device with flow guide type vacuum coating nozzle
A vacuum coating and nozzle technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve problems such as inability to show coating, uniformity, etc.
Active Publication Date: 2021-04-27
BAOSHAN IRON & STEEL CO LTD
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Problems solved by technology
[0011]The above-mentioned patents all involve the specific form of nozzles in the coating process, but it does not show that the coatings performed by these nozzles can reach a uniform degree, and the surface of the steel plate The uniformity of the coating is a key factor for its subsequent use such as bending and stamping
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[0061] Such as Figure 13 As shown, the surface of the steel plate 100 is vapor-coated with zinc, and the width of the steel plate 100 is 1000mm. After cleaning and drying, the steel plate 100 is heated to 120°C. Use the induction heater 15 to evaporate the zinc, and control the power to make the zinc in the crucible 13 reach a pressure of 20000Pa. At this time, the pressure regulating valve 18 is in a closed state. When the gas pressure in the crucible 13 reaches 20000Pa, open the pressure regulating valve 18, and the metal The steam 23 enters the flow distribution box 17 through the steam pipe 16, and the radial cross-sectional shape of the diversion column 21 adopts an equilateral triangle, wherein S 导流 / S 入口 =0.5, the voltage stabilizing plate 19 is a porous structure, S 孔隙总面积 / S 出口 =3, the internal pressure of the coating nozzle 20 is 5000Pa, the material of the coating nozzle 20 is graphite, and the outlet of the coating nozzle 20 adopts a slit shape, which is rectang...
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The invention discloses a vacuum coating device with a flow guide type vacuum coating nozzle. The vacuum coating device comprises a crucible, an induction heater is arranged on the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a steam pipeline, a horizontal pressure stabilizing plate is arranged in the flow distribution box body, the top of the flow distribution box body is connected with the coating nozzle, and a pressure regulating valve is arranged on the steam pipeline; the pressure stabilizing plate is of a porous structure; and a flow guide column is arranged at the connecting position of the flow distribution box body and the steam pipeline and located below the pressure stabilizing plate, and the ratio of the radial section area S flow guide of the flow guide column to the radial section area S inlet of the steam pipeline is larger than or equal to 0.1, that is, S flow guide / S inlet is larger than or equal to 0.1. When high-temperature steam makes contact with a low-temperature steel plate, a uniform coating is formed on the surface of the steel plate.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, more specifically, to a vacuum coating device with a flow-guiding vacuum coating nozzle. Background technique [0002] Physical vapor deposition (PVD) refers to the process of heating the metal to be plated under vacuum conditions to deposit it on the substrate in a gaseous state to form a coating. According to different heating methods, it is divided into electric heating (resistance or induction) and electron beam gun heating (EBPVD). Vacuum coating, as a surface modification and coating process, has been widely used in electronics, glass, plastics and other industries. The main advantages of vacuum coating technology lie in its environmental protection, good coating performance and the diversity of materials that can be plated. The key to applying vacuum coating technology to continuous strip steel lies in the aspects of continuous coating production, large area, high speed, and large-...
Claims
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Login to View More IPC IPC(8): C23C14/26
CPCC23C14/26
Inventor 樊俊飞任三兵李山青
Owner BAOSHAN IRON & STEEL CO LTD