A vacuum coating device with a flow-restriction nozzle
A vacuum coating and nozzle technology, which is applied in vacuum evaporation coating, sputtering coating, gaseous chemical coating, etc., can solve the problems of inability to show coating, uneven coating of steel plate, etc., and achieves simple operation, less investment, higher Effect of strip quality
Active Publication Date: 2022-01-14
BAOSHAN IRON & STEEL CO LTD
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Problems solved by technology
[0011] The above-mentioned patents all relate to the specific form of nozzles in the coating process, but it does not show that the coatings performed by these nozzles can reach a uniform degree, for example Figure 7 and Figure 8 For example, since the holes are spaced round holes to form a uniform coating on the surface of the steel plate, and based on the high-pressure gas sprayed out along the small holes, radial circular spots are formed, so during the movement of the steel plate, this If the round spots and the round spots do not overlap, it is easy to form a strip-shaped coating; if the round spots and the round spots are too close, the overlapping parts between the round spots will easily form a thicker coating. The non-overlapping parts form a thinner coating, resulting in uneven coating between steel plates
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[0059] Zinc is evaporated on the surface of the steel plate 100, the width of the steel plate 100 is 1000mm, after cleaning and drying, the steel plate 100 is heated to 120°C. Use the induction heater 15 to evaporate the zinc, and control the power to make the zinc in the crucible 13 reach a pressure of 20000Pa. At this time, the pressure regulating valve 18 is in a closed state. When the gas pressure in the crucible 13 reaches 20000Pa, open the pressure regulating valve 18, and the metal The steam 22 enters the flow distribution box 17 through the steam pipe 16, the damper plate 20 adopts a rectangle, wherein V1 / V2=2, D=1mm, the voltage stabilizing plate 19 is a porous structure, S 孔隙总面积 / S 出口 =3, the internal pressure of the nozzle 21 is 5000Pa, the material of the nozzle 21 is graphite, and the outlet of the nozzle 21 adopts a slit shape, which is rectangular, S 出口 / S 入口 = 0.95.
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The invention discloses a vacuum coating device with a flow-restricting nozzle, which comprises a crucible, an induction heater is arranged on the outside, the top of the crucible is connected with a flow distribution box through a steam pipe, and a flow distribution box is arranged in the flow distribution box. The horizontal pressure stabilizing plate, the top of the distribution box is connected with a nozzle, and the steam pipeline is provided with a pressure regulating valve; the pressure stabilizing plate is porous structure, and the lower surface of the pressure stabilizing plate is connected with a flow suppression The damper plate is also set horizontally, and a distance is formed between its side and the inner wall of the flow distribution box; the connection position between the flow distribution box and the steam pipeline is to the lower surface of the pressure stabilizing plate A jet relaxation area is formed between them, and a jet acceleration area is formed between the upper surface of the pressure stabilizing plate and the connection position between the flow distribution box and the nozzle. In the invention, when the high-temperature steam contacts the low-temperature steel plate, a uniform coating layer is formed on the surface of the steel plate.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device with a flow-restriction nozzle. Background technique [0002] Physical vapor deposition (PVD) refers to the process of heating the metal to be plated under vacuum conditions to deposit it on the substrate in a gaseous state to form a coating. According to different heating methods, it is divided into electric heating (resistance or induction) and electron beam gun heating (EBPVD). Vacuum coating, as a surface modification and coating process, has been widely used in electronics, glass, plastics and other industries. The main advantages of vacuum coating technology lie in its environmental protection, good coating performance and the diversity of materials that can be plated. The key to applying vacuum coating technology to continuous strip steel lies in the aspects of continuous coating production, large area, high speed, and large-scale production...
Claims
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IPC IPC(8): C23C14/26
CPCC23C14/26C23C14/243C23C14/16C23C14/562C23C14/24C23C14/228C23C14/56
Inventor 任三兵樊俊飞李山青张春伟金小礼
Owner BAOSHAN IRON & STEEL CO LTD