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Inertial sensor device and inertial measurement unit

A technology of inertial sensor and inertial meter, which is applied in the directions of measuring devices, instruments, surveying and mapping, and navigation, etc., and can solve problems such as the difficulty in miniaturizing inertial measuring devices

Pending Publication Date: 2022-02-25
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in the technology described in Patent Document 1, in order to correct the angular velocity signal and the acceleration signal respectively output from the angular velocity detection device and the acceleration detection device as physical quantity detection devices, or to control the detection of each of the angular velocity detection device and the acceleration detection device For operation, it is necessary to separate the signal processing circuit, arithmetic processing device and physical quantity detection device, and there is a problem that it is difficult to realize the miniaturization of the inertial measurement device

Method used

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  • Inertial sensor device and inertial measurement unit
  • Inertial sensor device and inertial measurement unit
  • Inertial sensor device and inertial measurement unit

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Experimental program
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Effect test

Embodiment approach 1

[0022] refer to Figure 1 ~ Figure 3 , the schematic configuration of the inertial sensor device 1 according to Embodiment 1 will be described. Also, for the sake of illustration, figure 2 Illustration of the cover 92 is omitted. Also, for the sake of illustration, figure 2 and image 3 Illustration of wiring, terminals, etc. is omitted. In addition, in the drawings, the dimensional ratio of each component is different from the actual one.

[0023] In the coordinates attached to the drawings, three axes perpendicular to each other will be described as an X axis, a Y axis, and a Z axis. Let the direction along the X axis be "X direction", let the direction along the Y axis be "Y direction", let the direction along the Z axis be "Z direction", and the direction of the arrow is the positive direction. In addition, the positive direction of the Z direction will be described as "up" or "upper", and the negative direction of the Z direction will be described as "down" or "be...

Embodiment approach 2

[0066] Next, refer to Figure 10 An inertial sensor device 1 a according to Embodiment 2 will be described. In addition, in the following description, differences from the above-mentioned first embodiment will be mainly described, and the same configurations as those in the first embodiment will be given the same reference numerals, and overlapping descriptions will be omitted. In addition, the internal configuration of the third inertial measurement unit 2C and the fourth inertial measurement unit 2D is the same as that of the second inertial measurement unit 2B, so in Figure 10 The illustration of the internal configuration of the third inertial measurement unit 2C and the fourth inertial measurement unit 2D is omitted.

[0067] In Embodiment 2, as in Embodiment 1, the first inertial measurement unit 2A operates as a master for controlling other inertial measurement units other than the first inertial measurement unit 2A, for example, the second inertial measurement unit 2...

Embodiment approach 3

[0072] Next, refer to Figure 11 An inertial sensor device 1b according to Embodiment 3 will be described. In addition, in the following description, differences from the above-mentioned first embodiment will be mainly described, and the same configurations as those in the first embodiment will be given the same reference numerals, and overlapping descriptions will be omitted. In addition, the internal configuration and operation of the third inertial measurement unit 2Cb and the fourth inertial measurement unit 2Db are the same as those of the second inertial measurement unit 2Bb, so in Figure 11 The illustration of the internal configuration of the third inertial measurement unit 2Cb and the fourth inertial measurement unit 2Db is omitted.

[0073] In Embodiment 3, as in Embodiment 1, the first inertial measurement unit 2Ab operates as a master for controlling other inertial measurement units other than the first inertial measurement unit 2Ab, for example, the second inert...

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Abstract

An inertial sensor device and an inertial measurement unit are provided which achieve reduction is size. The inertial sensor device includes a plurality of inertial measurement units, one of the inertial measurement units includes an inertial sensor, a reception section configured to receive data of another of the inertial measurement units, a combination processing section configured to operate the data of the another of the inertial measurement units and data of the one of the inertial measurement units, and a first transmission section configured to transmit output of the combination processing section.

Description

technical field [0001] The present invention relates to an inertial sensor device and an inertial measurement unit. Background technique [0002] In recent years, an inertial sensor manufactured using MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) technology has been developed as an electronic device. The S / N ratio of the output signal of such an inertial sensor is insufficient, and it is difficult to apply it to a device or system requiring high-precision measurement. [0003] Patent Document 1 discloses a physical quantity detection device in which detection electrodes of a plurality of physical quantity detection elements are electrically connected to a physical quantity detection circuit, and a detection signal obtained by adding signals output from detection electrodes of each physical quantity detection element is input. The physical quantity detection circuit does not use an adding circuit, and generates a physical quantity signal whose magni...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C21/16
CPCG01C21/166G01C21/183G01P1/023G01C21/16G01P15/0802G01P1/06
Inventor 日吉泰德
Owner SEIKO EPSON CORP