Maglev mechanism, compensation device and micro-motion equipment

A compensation device and maglev technology, which can be applied to electromechanical devices, holding devices using magnetic attraction or thrust, and electric components, etc., and can solve problems such as poor compensation effect.

Active Publication Date: 2022-07-08
YINGUAN SEMICON TECH CO LTD +1
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0006] The main purpose of the present invention is to provide a magnetic levitation mechanism, a compensation device and a micro-movement device to solve the problems in the prior art of compensation methods for the gravity of the micro-motion table, the elastic force of the flexible mechanism, and the driving force of the vertical motion of the micro-motion table. Problems with poor compensation

Method used

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  • Maglev mechanism, compensation device and micro-motion equipment
  • Maglev mechanism, compensation device and micro-motion equipment
  • Maglev mechanism, compensation device and micro-motion equipment

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Embodiment Construction

[0046] It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict. The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

[0047] It should be noted that the following detailed description is exemplary and intended to provide further explanation of the application. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0048] It should be noted that the terminology used herein is for the purpose of describing specific embodiments only, and is not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural as well, furthermore,...

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Abstract

The invention provides a magnetic levitation mechanism, a compensation device and a micro-movement device. The magnetic levitation mechanism includes: an inner magnetic steel component and two outer magnetic steel components, and the inner magnetic steel component includes a first magnetic steel and two second magnetic steels, each Each of the external magnetic steel components includes two third magnetic steels. When the XZ cross-section of the third magnetic steel is rectangular, the XZ cross-section of the second magnetic steel is an isosceles trapezoid; When the angle between the side surface of the second magnet steel and the first preset symmetry plane toward the first magnet steel is an acute angle, the XZ section of the second magnet steel is an isosceles trapezoid or a rectangle; when the XZ section of the second magnet steel is an isosceles trapezoid or rectangle; When it is an isosceles trapezoid, the width of the top surface of the lower second magnet steel among the two second magnet steels is smaller than the width of the bottom surface; the magnetic steel unit composed of the inner magnetic steel component and the two outer magnetic steel components can be A magnetic force with constant stiffness is generated in the Z-axis direction for compensating the force in the vertical direction of the external device connected with the magnetic levitation mechanism.

Description

technical field [0001] The present invention relates to the technical field of semiconductor micro-movement tables, in particular, to a maglev mechanism, a compensation device and a micro-movement device. Background technique [0002] In the field of semiconductor manufacturing or testing, the workpiece table is required to have the functions of handover and precise positioning of silicon wafers, and the core actuator in the workpiece table is the micro-movement table, which can realize the precise positioning of the Z, X and Y three axes of the silicon wafer. [0003] Among them, the vertical three-axis micro-motion table adopts a three-point actuator layout. In order to ensure the vertical performance, a flexible mechanism is usually used as the motion decoupling and guidance of the micro-motion table. In a small stroke range, the elastic sheet stiffness of the flexible mechanism is constant. The reaction force acting on the vertical actuator increases or decreases linearl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K41/035H02N15/00G12B5/00
CPCH02K41/0356H02N15/00G12B5/00Y02T10/7072
Inventor 彭仁强胡兵江旭初
Owner YINGUAN SEMICON TECH CO LTD
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