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Multi-mode non-cylindrical resonant cavity MPCVD device with conical reflection top surface

A non-cylindrical, resonant cavity technology, which is applied in the field of diamond processing, can solve the problems of low diamond synthesis power and slow growth speed, and achieve the effects of reducing silicon pollution, increasing growth speed, and convenient use

Pending Publication Date: 2022-03-18
成都稳正科技有限公司
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a multi-mode non-cylindrical resonator MPCVD device with a conical reflective top surface to solve the technical problems of low diamond synthesis power and slow growth rate limited by the existing resonant cavity structure

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  • Multi-mode non-cylindrical resonant cavity MPCVD device with conical reflection top surface

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Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0025] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying...

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Abstract

The invention discloses a multi-mode non-cylindrical resonant cavity MPCVD device with a conical reflection top surface, and solves the technical problems of low synthetic power and slow growth speed of diamond limited by the existing resonant cavity structure. The device comprises a microwave generating device used for microwave emission and a growth cavity connected with the microwave generating device and used for diamond synthesis. An annular quartz window is arranged in the growth cavity, a water-cooling copper table antenna is arranged above the annular quartz window, a threaded molybdenum table for placing a diamond crystal is arranged above the water-cooling copper table antenna, plasma is arranged above the threaded molybdenum table, and a conical reflecting surface is arranged on the top surface in the growth cavity. The device is simple in structure, scientific and reasonable in design and convenient to use, the microwave power can be greatly enhanced, the growth speed can be increased, and silicon pollution caused by plasma etching can be greatly reduced.

Description

technical field [0001] The invention belongs to the technical field of diamond processing, and in particular relates to a multi-mode non-cylindrical resonant cavity MPCVD device with a conical reflective top surface. Background technique [0002] Today, diamond has been widely used in various fields such as national defense, industry, science and technology, and medical care. It has excellent properties unmatched by other materials, making it one of the best all-round materials in the world today, and plays an irreplaceable role in many industrial fields. However, natural diamond reserves are small, and mining is difficult, and its quality is unstable, which cannot meet the needs of the industrial field or even the consumer field. [0003] Diamond synthesis by MPCVD is a new method developed in the 1980s to prepare high-quality diamonds. The microwave discharge area is concentrated and does not diverge, so the pollution of the epitaxial diamond film caused by electrode disc...

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Application Information

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IPC IPC(8): C23C16/511C23C16/27C30B29/04C30B25/08
CPCC23C16/511C23C16/274C30B29/04C30B25/08
Inventor 袁稳郑怡李兵
Owner 成都稳正科技有限公司
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