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A calibratable sub-nanometer high-precision micro-displacement device

A sub-nanometer, micro-displacement technology, applied in measurement devices, electrical devices, optical devices, etc., can solve the problems of staying in qualitative resolution, not quantitative control, etc., to solve quantitative calibration and pressure nano-scale high-precision micro Effects of Displacement Control Problems

Active Publication Date: 2022-06-21
HANGZHOU INST FOR ADVANCED STUDY UCAS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this closed-loop control capability is still at the level of qualitative resolution, not quantitative control.

Method used

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  • A calibratable sub-nanometer high-precision micro-displacement device
  • A calibratable sub-nanometer high-precision micro-displacement device
  • A calibratable sub-nanometer high-precision micro-displacement device

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Embodiment Construction

[0036] The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

[0037] like figure 1 shown, figure 1 It is a schematic diagram of the calibratable sub-nanometer-level high-precision micro-displacement device provided by the present invention. The high-precision micro-displacement device includes a fixed bottom plate 1, a moving top plate 2, a piezoelectric actuator 3, a capacitive sensor 4 and an FP cavity The bottom of the electric actuator 3 is mounted on the fixed bottom plate 1, the moving top plate 2 is mounted on the top of the piezoelectric actuator 3, the piezoelectric actuator 3 can drive the moving top plate 2 to translate up and down, and the capacitive sensor 4 is plated on the fixed bottom plate 1 Between it and the moving top plate 2, the FP cavity 5 is embedded on the fixed bottom plate 1 and the moving top plate 2 to ensure that light can pass through the FP cavity without obstruction.

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Abstract

The invention provides a calibratable sub-nanometer-level high-precision micro-displacement device, which has the following beneficial effects: the piezoelectric closed-loop control based on capacitance micrometer feedback can effectively eliminate the inherent hysteresis and creep characteristics of the piezoelectric actuator itself. Open-loop nonlinear control realizes high-precision micro-displacement control with sub-nanometer resolution capability, but this control capability is still at the level of qualitative resolution and cannot be used as a positioning reference in the field of precision positioning. The present invention utilizes the micro-displacement device equipped with The FP cavity can realize the quantitative calibration of micro-displacement with sub-nanometer resolution on high-performance spectrometers. The calibration results can be traced to the peak spacing of the transmission spectrum of the FP cavity to establish the applied voltage on the piezoelectric actuator and the sub-nanometer resolution. Quantitative calibration relationship of ability micro-displacement, so as to effectively solve the quantitative calibration of sub-nanometer resolution of piezoelectric closed-loop control based on capacitive micrometry technology and the problem of high-precision micro-displacement control of piezoelectric nanometer level.

Description

technical field [0001] The invention relates to the technical field of nano-positioning, in particular to a calibratable sub-nanometer-level high-precision micro-displacement device. Background technique [0002] The demand for positioning accuracy in cutting-edge science and high-tech fields such as ultra-precision machining, ultra-precision measurement, microelectronic engineering, and life science micromanipulation is increasing, effectively promoting the rapid development of nanometer and even sub-nanometer high-precision positioning technology. [0003] Piezoelectric actuators have fast response speed, ultra-high resolution of 0.01nm and large driving force, making them the first choice for driving components for ultra-precision motion positioning systems, and their resolution depends on the subdivision of the driving voltage. However, due to the inherent hysteresis and creep characteristics of piezoelectric actuators, their open-loop control is nonlinear, and the drivi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/02G01B11/02
CPCG01B7/02G01B11/02
Inventor 王义坤孟令强梁新栋丛蕊边伟贾建军王建宇
Owner HANGZHOU INST FOR ADVANCED STUDY UCAS
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