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Sub-nanoscale high-precision micro-displacement device capable of being calibrated and application of sub-nanoscale high-precision micro-displacement device

A sub-nanometer, micro-displacement technology, applied in measurement devices, electrical devices, optical devices, etc., can solve problems such as not quantitative control, but staying in qualitative resolution.

Active Publication Date: 2022-03-29
HANGZHOU INST FOR ADVANCED STUDY UCAS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this closed-loop control capability is still at the level of qualitative resolution, not quantitative control.

Method used

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  • Sub-nanoscale high-precision micro-displacement device capable of being calibrated and application of sub-nanoscale high-precision micro-displacement device
  • Sub-nanoscale high-precision micro-displacement device capable of being calibrated and application of sub-nanoscale high-precision micro-displacement device
  • Sub-nanoscale high-precision micro-displacement device capable of being calibrated and application of sub-nanoscale high-precision micro-displacement device

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Embodiment Construction

[0038] The present invention is described in further detail with reference to the accompanying drawings and specific embodiments.

[0039] Such as figure 1 as shown, figure 1 It is a schematic diagram of a calibratable sub-nanometer high-precision micro-displacement device provided by the present invention. The high-precision micro-displacement device includes a fixed bottom plate 1, a moving top plate 2, a piezoelectric actuator 3, a capacitive sensor 4 and an FP cavity 5, and a pressure sensor 4. The bottom of the electric actuator 3 is installed on the fixed bottom plate 1, the moving top plate 2 is installed on the top of the piezoelectric actuator 3, the piezoelectric actuator 3 can drive the moving top plate 2 to translate up and down, and the capacitive sensor 4 is plated on the fixed bottom plate 1 Between the moving top plate 2 and the fixed bottom plate 1 and the moving top plate 2, the FP cavity 5 is embedded to ensure that light can pass through the FP cavity with...

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Abstract

The invention provides a calibratable sub-nanoscale high-precision micro-displacement device and application thereof, and has the following beneficial effects that open-loop nonlinear control caused by inherent hysteresis and creep characteristics of a piezoelectric actuator can be effectively eliminated through piezoelectric closed-loop control based on capacitance micrometer feedback; in order to realize high-precision micro-displacement control of sub-nano-scale resolution capability, but the control capability still stays at a qualitative resolution level and cannot be used as a positioning reference in the field of precision positioning, the FP cavity equipped on the micro-displacement device can realize quantitative calibration of sub-nano-scale resolution capability micro-displacement on a high-performance spectrograph; the calibration result can be traced to the FP cavity transmission spectrum peak spacing so as to establish the quantitative calibration relationship between the applied voltage on the piezoelectric actuator and the sub-nanometer magnitude resolution capability micro displacement. Therefore, the problems of quantitative calibration of piezoelectric closed-loop control sub-nanometer magnitude resolution and nanoscale high-precision micro-displacement control based on a capacitance micrometer technology can be effectively solved.

Description

technical field [0001] The invention relates to the technical field of nano-positioning, in particular to a calibrated sub-nanometer high-precision micro-displacement device and its application. Background technique [0002] The demand for positioning accuracy in cutting-edge science and high-tech fields such as ultra-precision machining, ultra-precision measurement, microelectronics engineering, and life science micromanipulation is increasing, which effectively promotes the rapid development of nanometer or even sub-nanometer level high-precision positioning technology. [0003] Piezoelectric actuators have fast response speed, ultra-high resolution of 0.01 nm and large driving force. They have become the preferred driving elements for ultra-precise motion positioning systems, and their resolving power depends on the subdivision of the driving voltage. However, due to the inherent hysteresis and creep characteristics of the piezoelectric actuator itself, its open-loop cont...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02G01B11/02
CPCG01B7/02G01B11/02
Inventor 王义坤孟令强梁新栋丛蕊边伟贾建军王建宇
Owner HANGZHOU INST FOR ADVANCED STUDY UCAS
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