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Polycrystalline silicon on sapphire oil-free pressure sensor

A pressure sensor, sapphire technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, instruments, etc., can solve problems such as performance problems, pollution, measurement errors, etc.

Pending Publication Date: 2022-03-29
ROSEMOUNT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Additionally, isolation / sensor ceramics have a granular nature that is prone to impact / crack growth failure
Also, when configured for instrumentation measurements, ambient atmosphere enters the capacitive sensing cavity in some of these types of pressure transmitters, which can cause performance issues as the "air" dielectric may be wet / condensing and / or Contaminated in other ways, causing measurement errors

Method used

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  • Polycrystalline silicon on sapphire oil-free pressure sensor
  • Polycrystalline silicon on sapphire oil-free pressure sensor
  • Polycrystalline silicon on sapphire oil-free pressure sensor

Examples

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Embodiment Construction

[0018] Embodiments of the present disclosure are described more fully hereinafter with reference to the accompanying drawings. Elements identified with the same or similar reference numerals refer to the same or similar elements. To simplify illustration, some elements may not be shown in every figure.

[0019] Various embodiments of the present disclosure may, however, be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0020] figure 1 is a partially cutaway cutaway view of an example of a process control or measurement system 100 including a pressure transmitter 102 according to an embodiment of the disclosure. figure 2 yes figure 1 A cross-sectional view of a portion of transmitter 102 . The system 100 may be used in the process...

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Abstract

A pressure sensor assembly includes a pressure sensor having a support structure and a sapphire isolation member coupled to the support structure and forming a region between a first surface of the sapphire isolation member and the support structure. The second surface of the sapphire isolation member is positioned to engage with a fluid from or coupled to the process. An electrical lead is coupled to a polysilicon strain gauge pattern positioned in the region on the first surface of the sapphire isolation member, and the polysilicon strain gauge pattern is configured to generate an electrical signal indicative of the pressure of the fluid when the sapphire isolation member deflects in response to the pressure.

Description

Background technique [0001] Embodiments of the present disclosure relate to industrial process transmitters, and more particularly, to pressure sensor assemblies used in such transmitters. [0002] Industrial process field devices, such as process transmitters, are used in industrial process control and monitoring systems to monitor industrial process variables and transmit measured values ​​of process variables back to, for example, chemical, oil, gas, pharmaceutical, or other fluid processing plants. control room. The term "process variable" refers to a physical or chemical state of matter or a transformation of energy. Examples of process variables include pressure, temperature, flow, conductivity, pH, and other properties. [0003] Pressure transmitters and other pressure sensing field devices or instruments include pressure sensors that sense pressure, such as the pressure of a process fluid. Pressure sensors provide an electrical output indicative of sensed pressure. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L19/00
CPCG01L19/0046G01L9/0055G01L19/0618G01L19/0627G01L19/0092G01L9/0075G01L19/0084G01L19/147
Inventor 大卫·安德鲁·布罗登查尔斯·雷·威尔科克斯
Owner ROSEMOUNT INC