Data presentation method, device and equipment based on RMS system and storage medium

[0058] In order to make the objects, technical solutions, and advantages of the present disclosure, the technical solutions in the present disclosure are clear and completely described in connection with the embodiments of the present disclosure, and It is a part of the embodiments of the present disclosure, not all of the embodiments. Components of the present disclosure embodiments described and illustrated in the drawings herein can be arranged and designed in a variety of different configurations. Therefore, the detailed description of the embodiments of the present disclosure provided in the drawings is not intended to limit the scope of the disclosure of claimed, but only the selected embodiments of the present disclosure. Based on the embodiments of the present disclosure, those skilled in the art do not have the scope of the present disclosure without making creative labor.

[0059] It should be noted that similar reference numerals and letters represent the similar items in the following figures, and therefore, once one is defined in one bysertation, it is not necessary to further define and explain it in the following drawings.

[0060] As described herein, "and / or" is merely describing an association relationship, indicating that there may be three relationships, such as A and / or B, which can be represented: alone present A, while there is A and B, alone present B three Case. In addition, the term "at least one" herein represents any combination of at least two of any one or more of the various types, for example, including at least one of A, B, and C, which can be expressed from A, Any one or more elements selected in the set of B and C.

[0061] Recipe Control Management System (RMS), the RMS system, is used to store the standard production parameters of the production semiconductor uploaded by the user to the database, and the actual actual situation used when the standard production parameters and the actual semiconductor actually produced on the machine. Production parameters perform comparison analysis, acquiring comparison results, and show in the RMS system.

[0062] It has been studied that with the development of technology, semiconductor as a hardware foundation of science and technology development, has gradually become more and more important. When making a semiconductor, it is mainly used for the production of silicon wafers, the fabrication of the wafer and semiconductor, and the production parameters in the machine, the production parameters in the machine in the machine, and the production parameters uploaded by the user are analyzed in the production of these processes. In contrast, it is currently manually analyzed comparison, which cannot guarantee the accuracy of the data contrast and consume a lot of time.

[0063] Based on the above studies, the present disclosure provides a data presentation method, apparatus, apparatus, device, and storage medium based on the RMS system, wherein the method comprises: acquiring the first production parameter information of the production data sequence producing the semiconductor in the target machine, and the database The second production parameter information for producing the standard data sequence of the semiconductor; compares the first production parameter information and the second production parameter information to obtain an overall contrast result; compare the first sub-parameter information in the first production parameter information The second sub-parameter information in the second production parameter information is obtained in detail; the overall contrast result is displayed in the main production monitoring page, which exhibits the detailed comparison result in the sub-production monitoring page. In this way, the data alignment accuracy can be improved, and the user's reading efficiency can be improved by layering different forms of results.

[0064] In order to facilitate the understanding of the present embodiment, a data presentation method according to an RMS system disclosed in the present disclosure is first introduced, and the execution body of the RMS system-based data presence method according to the present disclosure is generally having a certain amount. A computer device of computing power, including, for example, a terminal device or a server or other processing device, the terminal device can be a user equipment (User Equipment, UE), mobile device, user terminal, terminal, cellular phone, cordless telephone, personal number Assistant, PDA, handheld equipment, computing equipment, car equipment, wearable devices, etc. In some possible implementations, the RMS system-based data rendering method can be implemented by a computer readable instruction stored in the memory.

[0065] See figure 1 As shown, a flow chart of an RMS system-based data presentation method provided in the present disclosure, the method includes steps S101 to S104, wherein:

[0066] S101: Gets the first production parameter information of the production data sequence producing the semiconductor in the target machine and the second production parameter information of the standard data sequence of the semiconductor in the database, wherein the first production parameter information and the second production parameter information are Information corresponding to the same production parameters.

[0067] Here, the target machine has a target machine's machine logo, model, and other information, the target machine can refer to one or more of the following machines: single crystal furnace, gas phase extension, oxidation furnace, magnetron sputtering station , Chemical mechanical polishing machine, photolithography, ion injection machine, lead bonding machine, wafer dielectric, wafer thinner, etc.

[0068] In addition, the production data sequence is the production data required for the target machine to produce the semiconductor. It is specifically set by the operator of the machine according to the specific practice production, and each production data sequence carries at least one first production parameter information. The first production parameter information can be referred to: temperature, pressure, pulling speed and speed, chemical gas quality, etc. The standard data sequence is used as production data stored in the database in the database in the RMS system, which is specifically set and stored in the RMS system according to the user's needs, each standard data sequence carries at least one second production parameter information. The second production parameter information production parameters can be referred to: temperature, pressure, pulling speed and speed, chemical gas quality, etc. The first production parameter information and the second production parameter information are information corresponding to the same production parameters, for example, when the first production parameter information is obtained, the second production parameter information does not produce the temperature of the semiconductor.

[0069] Further, in an alternative embodiment, the first production parameter information of the production data sequence producing the semiconductor in the target machine is acquired in the following manner:

[0070] Based on the machine logo of the target machine selected, obtain the name of all production data sequences produced in this target machine, where the production data sequence has different version information, the version information including the entry into force and draft version;

[0071] Determine the production data sequence with the name according to the name of the production data sequence selected by the user;

[0072] The first production parameter information of the production data sequence is determined based on the production data sequence having the name, a production data sequence having the name, the production data sequence filtered from the production data sequence of the name.

[0073] In this step, when the first production parameter information of the production data sequence of the production semiconductor in the target machine is acquired, first, the user selects the terminal identity of the target machine to which the production data to which you need to obtain, select the data selection page of the RMS. According to the machine identifier selected by the user, the RMS system automatically retrieves the name of all production data sequences with the machine identifier in the database, and exhibits the machine logo and corresponding machine in the Data Selection page of the RMS system. The name of all production data sequences, so that the user can directly select the name of the production data sequence of the corresponding machine identity, the RMS system receives the name of the production data sequence of the user selected, and finds the corresponding production in the database. All production data sequences corresponding to the name of the data sequence, and all the production data sequences found in the data selection page, where the production data sequence has different version information including the effective version and draft version, the RMS system is selected according to all the production data selected by the user The version information in the sequence is the production data sequence of the entry into force, and the previous production parameter information for the production data sequence of the effective version is tiled in the database.

[0074] Exemplary, the user selection machine identifies "SEQU01", the RMS system detects that the production data sequence corresponding to "SEQU01" machine is "1000A_W", "1001a_w", "1002a_w", etc., the user is based on the corresponding RMS system " Sequ01 "Production Data Sequence of the machine, the production data sequence named" 1000A_W ", the RMS system receives the production data sequence named" 1000A_W "after the" 1000A_W "selected by the user, and finds all the versions of the name" 1000A_W ". And on the page for user selection, after the user selects the production data sequence of the effective version, the RMS system finds all production parameters of the production data sequence corresponding to the effective version in the database.

[0075] S102: Contrast the first production parameter information and the second production parameter information to obtain an overall contrast result.

[0076] Here, both the first production parameter information and the second production parameter information may include serial numbers, cavity identifiers, step ID, step name, production parameter name, production parameter type, production parameter value, and so on. The first production parameter information and the second production parameter information contain sub-production parameter information.

[0077] Since the first production parameter information in the machine and the second production parameters in the RMS database may be different, it is necessary to compare two production parameter information, matching the two production parameters, and the parameter name is the same, resulting in the overall contrast Result: If the match is successful, continue to compare sub-parameter information in the production parameter information; if the difference is unsuccessful.

[0078] S103: Contrast the first sub-parameter information in the first production parameter information and the second sub-parameter information in the second production parameter information, where the detailed comparison result is obtained, wherein the first sub-parameter information and the second The sub-parameter information is information corresponding to the same production parameters.

[0079]Here, the production data sequence may include a plurality of sub-production data, corresponding to the first production parameter information corresponding to the production data sequence includes a plurality of first sub-parameter information, and the standard data sequence may include a plurality of sub-standard data, corresponding to the second production parameters corresponding to the standard data sequence. The information includes a plurality of second sub-parameter information, which can include serial numbers, cavity identifiers, step ID, step name, production parameter name, production parameter type, production parameter value, etc. .

[0080] Since the first sub-parameter information and the second sub-parameter information may be different, the first sub-parameter information and the second sub-parameter information may be different, and the first sub-parameter information and the second sub-parameter information are respectively corresponding. Whether the parameter name is the same, to obtain a detailed comparison result:

[0081] The first sub-parameter information and the second sub-parameter information are information corresponding to the same production parameters, for example, when the obtained first sub-parameter information is a temperature of the semiconductor, the second sub-parameter information does not produce the temperature of the semiconductor.

[0082] S104: Display the overall contrast result in the main production monitoring page, exhibiting the detailed comparison result in the sub-production monitoring page.

[0083] Here, the overall contrast result is a mapping relationship with the detailed comparison result, and the main production monitoring page has a mapping relationship with the sub-production monitoring page.

[0084] Further, in an alternative embodiment, the overall comparison result is displayed in the main production monitoring page, which exhibits the detailed comparison result at the sub-production monitoring page, including:

[0085] The overall contrast result is presented in the form of the primary production monitoring page in the form of link text;

[0086] Establish the overall contrast result and the mapping relationship of the detailed comparison result, and the detailed comparison result of the establishment of the mapping relationship is demonstrated in the form of the sub-production monitoring page to respond to the user's click operation in the main production monitoring page. Jump to the sub-production monitoring page.

[0087] In this step, the overall result is displayed in the main production monitoring page in the form of different link text, for example, if the overall result is successful, the total result is used to represent the overall result. If the overall result is unsuccessful, the fork is expressed as the whole. As a result, each overall result is associated with the corresponding detailed result in the form of a link, thereby establishing the overall contrast result and the mapping relationship of the detailed comparison result, and the detailed result of the overall result is a form of detailed results, And put the form exhibition in sub-production monitoring page to facilitate users to view.

[0088] In this example, the data presence method based on the RMS system is based, by acquiring the first production parameter information of the production data sequence producing the semiconductor in the target machine and the second production parameter information of the standard data sequence producing the semiconductor in the database; contrast the first A production parameter information and the second production parameter information, resulting in an overall contrast result; comparing the first sub-parameter information in the first production parameter information and the second sub-parameter information in the second production parameter information, obtained Detailed comparison results; display the overall comparison result in the main production monitoring page, showing the detailed comparison results in the sub-production monitoring page. In this way, the data alignment accuracy can be improved, and the user's reading efficiency can be improved by layering different forms of results.

[0089] See figure 2 As shown, a flow chart of another RMS system based on an embodiment of the present disclosure, the method includes steps S201 to S206, wherein:

[0090] S201: Gets the first production parameter information of the production data sequence produced in the target machine and the second production parameter information of the standard data sequence producing the semiconductor in the database, wherein the first production parameter information and the second production parameter information are Information corresponding to the same production parameters.

[0091] S202: Detects whether the second production parameter information is the same as the first production parameter information, the second production parameter information is identified, and the detection result is obtained; wherein the cavity identifies the identifier of the container of the semiconductor. Here, before the first production parameter information and the second production parameter information are compared, the first production parameter information and the second production parameter information are predicted, and the name of the production parameter information and the same cavity identification are the same. The name of the production information and whether it belongs to the data of the vacuum chamber of the same machine, and the successful data is compared to the first production parameter information and the second production parameter information, and improve the efficiency of data processing.

[0092] S203: Presence the test results in the form of a form in the main production monitoring page.

[0093] Further, in an alternative embodiment, if the detection result is present, the detection result is in the form of a form in the form of the primary production monitoring page, including:

[0094] The first production parameter information and the second production parameter information are in the form of a form and are now in the main production monitoring page;

[0095] Wherein, the first production parameter information and the second production parameter information have the same production parameter information name and cavity identifier.

[0096] Further, in an alternative embodiment, if the detection result does not exist, the detection result is in the form of a form in the form of the primary production monitoring page, including:

[0097] The presence of the first production parameter information and the second production parameter information are independent in the form of a form, and there is a color identifier in the master production monitoring page;

[0098] Wherein, the first production parameter information and the second production parameter information have different production parameter information and cavity names.

[0099] S204: Contrast the first production parameter information and the second production parameter information to obtain an overall contrast result.

[0100] S205: Contrast the first sub-parameter information in the first production parameter information and the second sub-parameter information in the second production parameter information, where the detailed comparison result is obtained, wherein the first sub-parameter information and the second The sub-parameter information is information corresponding to the same production parameters.

[0101] S206: Display the overall contrast result in the main production monitoring page, showing the detailed comparison results in the sub-production monitoring page.

[0102] The description of steps S201, steps S204 to step S206 may be referred to in steps S101 to S104, and the same technical effects can be achieved, and the same technical problems can be achieved, and will not be described here.

[0103] In this example, the data presence method of the RMS system is disclosed, by detecting whether the second production parameter information is the same as the first production parameter information, the second production parameter information is identified, and the detection result is obtained. The master production monitor page is presented in the form of a form. Thus, before performing the production parameters in the machine, the two data is first matched and the matching of the cavity identifier is first compared to the data comparison, and the efficiency of the production parameter comparison is improved.

[0104] Those skilled in the art will appreciate that in the above-described method of the specific embodiments, the writing order of each step does not mean the strict execution order and constitute any definition of the implementation process, and the specific execution order of each step should be in its function and possible. Intrinsic logic determined.

[0105] Based on the same inventive concept, the present disclosure also provides an RMS system-based data presentation apparatus corresponding to an RMS system based data presentation method. Since the principle of the device solves the problem in the embodiment of the present disclosure, the present disclosure is based on The data rendering method of the RMS system is similar, so the implementation of the device can see the implementation of the method, and details will not be described again.

[0106] See Figure 3 to 4 , image 3 One of the schematic diagrams of a data rendering device based on the RMS system provided in the present disclosure embodiment, Figure 4 A schematic diagram of a data presentation apparatus based on an embodiment of the present disclosure. Such as image 3 As shown in the present disclosure, an embodiment of the RMS system is provided, including:

[0107] The data acquisition module 310 is used to obtain the first production parameter information of the production data sequence producing the semiconductor in the target machine and the second production parameter information of the standard data sequence producing the semiconductor in the database, wherein the first production parameter information and the first The two production parameter information is information corresponding to the same production parameters;

[0108] The first contrast module 320 is configured to compare the first production parameter information and the second production parameter information to obtain an overall contrast result;

[0109] The second contrast module 330 is configured to compare the first sub-parameter information in the first production parameter information and the second sub-parameter information in the second production parameter information, where the detailed comparison result is obtained, wherein the first The sub-parameter information and the second sub-parameter information are information corresponding to the same production parameters;

[0110] The result display module 340 is configured to display the overall contrast result at the main production monitoring page, and exhibit the detailed comparison result in the sub-production monitoring page.

[0111] In an alternative embodiment, the data acquisition module 310 acquires the first production parameter information of the production data sequence producing semiconductor in the target machine in the following manner:

[0112] Based on the machine logo of the target machine selected, obtain the name of all production data sequences produced in this target machine, where the production data sequence has different version information, the version information including the entry into force and draft version;

[0113] Determine the production data sequence with the name according to the name of the production data sequence selected by the user;

[0114] The first production parameter information of the production data sequence is determined based on the production data sequence having the name, a production data sequence having the name, the production data sequence filtered from the production data sequence of the name.

[0115] In an alternative embodiment, the apparatus further includes a detection module 350, which is for:

[0116] Detecting whether the second production parameter information is the same as the name of the first production parameter information and the cavity identifier, resulting in a detection result; wherein the cavity identifies the identifier of the container of the semiconductor;

[0117] The detection result is presented in the form of a form in the form of the primary production monitoring page.

[0118] In an alternative embodiment, the detecting module 350 is specifically used in the form of the primary production monitoring page in the form of a form of a form in an alternative embodiment.

[0119] The first production parameter information and the second production parameter information are in the form of a form and are now in the main production monitoring page;

[0120] Wherein, the first production parameter information and the second production parameter information have the same production parameter information name and cavity identifier.

[0121]In an alternative embodiment, the detecting module 350 is specifically used in the form of a form of a form in the form of a form, and the detection module 350 is not present in the form of a form.

[0122] The presence of the first production parameter information and the second production parameter information are independent in the form of a form, and there is a color identifier in the master production monitoring page;

[0123] Wherein, the first production parameter information and the second production parameter information have different production parameter information and cavity names.

[0124] In an alternative embodiment, the result display module 340 is specifically used:

[0125] The overall contrast result is presented in the form of the primary production monitoring page in the form of link text;

[0126] Establish the overall contrast result and the mapping relationship of the detailed comparison result, and the detailed comparison result of the establishment of the mapping relationship is demonstrated in the form of the sub-production monitoring page to respond to the user's click operation in the main production monitoring page. Jump to the sub-production monitoring page.

[0127] The description of the processing flow of each module in the device, and the description of the interaction flow between the modules, can be referred to in the above method embodiments, which will not be described in detail herein.

[0128] In the present disclosure, an RMS system-based data presentation device is disclosed, and a second production parameter information of the production parameter information of the production data sequence producing the semiconductor in the target machine and the second production parameter information of the standard data sequence produced in the database; contrast The first production parameter information and the second production parameter information are obtained, to obtain an overall contrast result; compare the first sub-parameter information in the first production parameter information and the second sub-parameter information in the second production parameter information, Detailed comparison results are obtained; the overall contrast result is displayed in the main production monitoring page, and the detailed comparison result is displayed in the sub-production monitoring page. In this way, the data alignment accuracy can be improved, and the user's reading efficiency can be improved by layering different forms of results.

[0129] Based on the same technical idea, the embodiment of the present application also provides an electronic device. The present disclosure also provides an electronic device 500, such as Figure 5 As shown, the electronic device 500 provided for the embodiment of the present disclosure, including:

[0130] Processor 510, memory 520, and bus 530; memory 520 for storing execution instructions, including memory 521, and external memory 522; memory 521 herein also referred to as internal memory for temporarily storeing operational data in processor 510, and with Data exchanged by external memory 522, processor 510 exchanged with external memory 522, and the electronic device 510 communicates with the memory 520 when the electronic device 500 is operated by memory 521. The processor 510 can perform the steps of the RMS-based data presentation method shown in the above method embodiment.

[0131] The present disclosure also provides a computer storage medium that stores a computer program on which the computer program is operated by the processor to perform the step of the RMS system-based data presentation method according to the above method embodiment. Wherein, the storage medium can be a volatile or non-volatile computer readable storage medium.

[0132] The present disclosure also provides a computer program product that carries a program code, the program code includes an instruction of the RMS system based in the above method embodiment, specifically Referring to the above method embodiments, details are not described herein.

[0133] Among them, the above computer program products can be implemented in a manner of hardware, software, or a combination thereof. In an alternative embodiment, the computer program product is embodied as a computer storage medium, in another alternative embodiment, computer program products are embodied as software products, such as software development kits (Software Development Kit, SDK), etc. Wait.

[0134] Those skilled in the art can clearly understand that in order to describe convenient and concise, the specific operation of the above-described device, storage medium, and apparatus can refer to the corresponding process in the foregoing method embodiment, and will not be described herein. In several embodiments provided in the present disclosure, it should be understood that the disclosed devices, storage media, devices, and methods can be implemented in other ways. The embodiment described above is merely schematic, for example, the division of the unit is only a logical function division, and there may be additional division modifications when actually realized, for example, multiple units or components can be combined or It can be integrated into another, or some features can be ignored, or not executed. Another point, the coupling or direct coupling or communication between the displayed or discussed may be an electrical, mechanical or other form.

[0135] The unit as the separation member may be or may not be physically separated, and the components displayed as the unit may be or may not be a physical unit, i.e., in one place, or can also be distributed to a plurality of network elements. The object of the present embodiment can be implemented in accordance with the actual needs to select some or all units.

[0136] Further, each functional unit in the embodiments of the present disclosure may be integrated into one processing unit, or may be generated separately in each unit, or two or more units can be integrated into one unit.

[0137] The function can be stored in a nonvolatile computer-readable storage medium that can be performed in one processor if the software function unit is implemented or used as a separate product sales or in use. Based on this understanding, the technical solution of the present disclosure essentially or contributes to the prior art or the portion of the technical solution can be embodied in the form of software products, the computer software product stores in a storage medium, including Several instructions are used to enable a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the method described in various embodiments of the present disclosure. The aforementioned storage medium includes: U disk, mobile hard disk, read-onlymemory, ROM, random access memory, RAM ACAM Access Memory, RAM, or disc or optical disk, etc. can store program code.

[0138] It will be noted in that the above-described embodiments are intended to illustrate the technical solutions of the present disclosure, and the scope of the present disclosure is not limited thereto. EXAMPLES TECHNICAL INVENTION To be understood by those skilled in the art: Or can easily think of change, or part of the technical features in which these modifications, variations or replacements do not allow the nature of the corresponding technical solution from the spirit and scope of the present disclosure, and should be covered in this disclosure Within the protection range. Therefore, the scope of the present disclosure should be based on the scope of protection of the claims.