Data presentation method, device and equipment based on RMS system and storage medium
Through the data presentation method based on the RMS system, semiconductor production parameters are compared, which solves the problems of inaccurate manual comparison and time consumption, and achieves more efficient data display and analysis.
CN114326626AInactive Publication Date: 2022-04-12SAIMEITE TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SAIMEITE TECH CO LTD
- Filing Date
- 2021-12-29
- Publication Date
- 2022-04-12
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
Technical Problem
In the semiconductor production process, manual comparison of production parameters between machines and databases has problems of data comparison inaccuracy and time consumption.
Method used
Using the data presentation method based on the RMS system, by obtaining the production data sequence in the target machine and database, conducting parameter comparisons, and displaying the results hierarchically on the main and sub-production monitoring pages, improving the accuracy of data comparison and user reading efficiency .
Benefits of technology
It improves the accuracy of data comparison and user reading efficiency, and reduces the time consumption of manual comparison.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention provides a data presentation method, device and equipment based on an RMS system and a storage medium, and the method comprises the steps: obtaining first production parameter information of a production data sequence of a production semiconductor in a target machine and second production parameter information of a standard data sequence of the production semiconductor in a database; comparing the first production parameter information with the second production parameter information to obtain an overall comparison result; comparing first sub-parameter information in the first production parameter information with second sub-parameter information in the second production parameter information to obtain a detailed comparison result; and displaying the overall comparison result on a main production monitoring page, and displaying the detailed comparison result on a sub-production monitoring page. In this way, the data comparison accuracy can be improved, and the reading efficiency of the user can be improved by displaying different forms of results in a layered mode.
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