Data presentation method, device and equipment based on RMS system and storage medium

A data and production data technology, applied in the field of data processing, can solve problems such as the inability to guarantee the accuracy of data comparison and time consumption

Pending Publication Date: 2022-04-12
赛美特科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The production of semiconductors mainly includes the production of silicon wafers, the production of wafers, and the packaging and testing of semiconductors. During the production of these processes, it is necessary to analyze the pr

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  • Data presentation method, device and equipment based on RMS system and storage medium
  • Data presentation method, device and equipment based on RMS system and storage medium
  • Data presentation method, device and equipment based on RMS system and storage medium

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[0058] In order to make the objects, technical solutions, and advantages of the present disclosure, the technical solutions in the present disclosure are clear and completely described in connection with the embodiments of the present disclosure, and It is a part of the embodiments of the present disclosure, not all of the embodiments. Components of the present disclosure embodiments described and illustrated in the drawings herein can be arranged and designed in a variety of different configurations. Therefore, the detailed description of the embodiments of the present disclosure provided in the drawings is not intended to limit the scope of the disclosure of claimed, but only the selected embodiments of the present disclosure. Based on the embodiments of the present disclosure, those skilled in the art do not have the scope of the present disclosure without making creative labor.

[0059] It should be noted that similar reference numerals and letters represent the similar items ...

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Abstract

The invention provides a data presentation method, device and equipment based on an RMS system and a storage medium, and the method comprises the steps: obtaining first production parameter information of a production data sequence of a production semiconductor in a target machine and second production parameter information of a standard data sequence of the production semiconductor in a database; comparing the first production parameter information with the second production parameter information to obtain an overall comparison result; comparing first sub-parameter information in the first production parameter information with second sub-parameter information in the second production parameter information to obtain a detailed comparison result; and displaying the overall comparison result on a main production monitoring page, and displaying the detailed comparison result on a sub-production monitoring page. In this way, the data comparison accuracy can be improved, and the reading efficiency of the user can be improved by displaying different forms of results in a layered mode.

Description

technical field [0001] The present disclosure relates to the technical field of data processing, and in particular, relates to a data presentation method, device, device and storage medium based on an RMS system. Background technique [0002] With the development of science and technology, semiconductors, as the basic hardware raw materials for the development of science and technology, have gradually become more and more important. The production of semiconductors mainly includes the production of silicon wafers, the production of wafers, and the packaging and testing of semiconductors. During the production of these processes, it is necessary to analyze the production parameters in the semiconductor production machine and the production parameters uploaded by users. Comparisons are currently done manually, which cannot guarantee the accuracy of data comparisons and consumes a lot of time. Contents of the invention [0003] Embodiments of the present disclosure at least ...

Claims

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Application Information

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IPC IPC(8): G05B19/418
CPCY02P90/02
Inventor 何建波
Owner 赛美特科技有限公司
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