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Data presentation method, device and equipment based on RMS system and storage medium

A data and production data technology, applied in the field of data processing, can solve problems such as the inability to guarantee the accuracy of data comparison and time consumption

Pending Publication Date: 2022-04-12
赛美特科技有限公司
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  • Summary
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  • Description
  • Claims
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Problems solved by technology

The production of semiconductors mainly includes the production of silicon wafers, the production of wafers, and the packaging and testing of semiconductors. During the production of these processes, it is necessary to analyze the production parameters in the semiconductor production machine and the production parameters uploaded by users. Comparisons are currently done manually, which cannot guarantee the accuracy of data comparisons and consumes a lot of time

Method used

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  • Data presentation method, device and equipment based on RMS system and storage medium
  • Data presentation method, device and equipment based on RMS system and storage medium
  • Data presentation method, device and equipment based on RMS system and storage medium

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Embodiment Construction

[0058] In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only It is a part of the embodiments of the present disclosure, but not all of them. The components of the disclosed embodiments generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the present disclosure provided in the accompanying drawings is not intended to limit the scope of the claimed disclosure, but merely represents selected embodiments of the present disclosure. Based on the embodiments of the present disclosure, all other embodiments obtained by those ski...

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Abstract

The invention provides a data presentation method, device and equipment based on an RMS system and a storage medium, and the method comprises the steps: obtaining first production parameter information of a production data sequence of a production semiconductor in a target machine and second production parameter information of a standard data sequence of the production semiconductor in a database; comparing the first production parameter information with the second production parameter information to obtain an overall comparison result; comparing first sub-parameter information in the first production parameter information with second sub-parameter information in the second production parameter information to obtain a detailed comparison result; and displaying the overall comparison result on a main production monitoring page, and displaying the detailed comparison result on a sub-production monitoring page. In this way, the data comparison accuracy can be improved, and the reading efficiency of the user can be improved by displaying different forms of results in a layered mode.

Description

technical field [0001] The present disclosure relates to the technical field of data processing, and in particular, relates to a data presentation method, device, device and storage medium based on an RMS system. Background technique [0002] With the development of science and technology, semiconductors, as the basic hardware raw materials for the development of science and technology, have gradually become more and more important. The production of semiconductors mainly includes the production of silicon wafers, the production of wafers, and the packaging and testing of semiconductors. During the production of these processes, it is necessary to analyze the production parameters in the semiconductor production machine and the production parameters uploaded by users. Comparisons are currently done manually, which cannot guarantee the accuracy of data comparisons and consumes a lot of time. Contents of the invention [0003] Embodiments of the present disclosure at least ...

Claims

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Application Information

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IPC IPC(8): G05B19/418
CPCY02P90/02
Inventor 何建波
Owner 赛美特科技有限公司
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