System for analyzing surface topography of object at high speed based on virtual optical tomography technology

Abstract

A system for analyzing the surface morphology of an object at a high speed based on a virtual optical tomography technology comprises a plurality of optical fibers, the optical fibers are connected with optical fiber switches, the optical fiber switches control the turn-off of data transmission channels of the optical fibers, the optical fiber switches are connected with collimators, and optical signals passing through the collimators are emitted into a beam splitter. A reference surface and an object surface are sequentially arranged on the lower surface of the beam splitter, a mechanical oscillating device is arranged on the reference surface, the reference surface is driven by the mechanical oscillating device to move, and an optical signal passing through the beam splitter is sequentially emitted to the reference surface and the object surface and then reflected into the objective lens through the reference surface and the object surface. The optical signal passing through the objective lens is transmitted to the image capturing device, and the image capturing device obtains parameters of the surface of the object. The single-wavelength phase is solved through the mechanical oscillation device, high-speed analysis is carried out on the morphology of the surface of the object through the virtual optical tomography technology, the surface morphology of the object is derived, and the multi-valued problem is solved.

Description

technical field [0001] The invention relates to the field of optical technology, in particular to a system for high-speed analysis of object surface topography based on virtual optical tomography technology. Background technique [0002] Such polished surfaces on different types of objects can be several square meters in size and require a surface accuracy of 1 micron or less, in addition, the weight of the object itself including the polished surface is also large, for example, automotive components For the polishing of molds, engine parts, medical implants (artificial hip joints), optical devices, etc., the surface polishing accuracy of the objects is very small. Nowadays, the polishing process of objects with polished surfaces is carried out in the laboratory, where the surface of the object needs to be measured in a small area at a time. The purpose of polishing the surface of the object is to create a predefined Predefined structures defined by surface parameters (eg, ...

AI Technical Summary

Problems solved by technology

Nowadays, the polishing process of objects with polished surfaces is carried out in the laboratory. In the laboratory, it is necessary to measure the surface of the object in a small area at one time. The purpose of polishing the surface of the object is to create A predefined structure defined by surface parameters (e.g., smoothness, root mean square of surface topography, definition of grooves and lines at predefined depths, sharpness and peaks at specified heights, orientation of structures, etc.), such The parameters must be achieved by industrial means, and are usually defined together as the "quality" of the surface of the object. The existing means of measuring the surface of the object are mostly carried out manually, and the quality is established by looking at the object through manual polishing, and even a small part uses automation such as robots. The measurement method of the equipment must also be manually inspected by taking the object out of the processing chamber, which has a low degree of automation and cannot meet the increasing accuracy requirements of the present

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