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Method for producing conical light wave guide

A tapered optical waveguide and tapered technology, which is applied in the coupling of optical waveguides, optical waveguide light guides, light guides, etc., can solve the problems of controlling the limitations of the shape of the tapered shape, complex processing, etc.

Inactive Publication Date: 2005-06-29
SAMSUNG ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] In the conventional method as above, complex processing must be performed and there is a limitation in controlling the shape of the cone
Furthermore, it is difficult to apply these conventional methods to the mass production of waveguides

Method used

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  • Method for producing conical light wave guide
  • Method for producing conical light wave guide
  • Method for producing conical light wave guide

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Embodiment Construction

[0020] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same or similar components, although shown in different drawings. For clarity and conciseness, detailed descriptions of known functions and constructions incorporated herein will be omitted since they would otherwise obscure the subject matter of the present invention.

[0021] 3A to 3G are cross-sectional views showing the process of manufacturing a tapered waveguide according to an embodiment of the present invention, in which a center layer is formed having a sloped profile in vertical and horizontal side view directions. In this specification, the expression "tapered on the vertical side" means that the shape is inclined toward the right or left when viewed from a side view direction, while the expression "tapered on the horizontal side" means that the The shape is...

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Abstract

A method of fabricating tapered optical waveguides by which waveguides of different sizes can be optically connected to each other. In this method, light is exposed to a photoresist applied on the central layer through a grayscale mask, and the degree and duration of exposure of the photoresist are controlled to form an oblique profile on the central layer. Then, by controlling the profile of the photoresist pattern and the etching selection ratio between the photoresist and the central layer, the profile of the tapered waveguide can be precisely controlled.

Description

technical field [0001] The present invention relates to a method of manufacturing optical waveguides, and more particularly to a method of manufacturing tapered optical waveguides by which two optical waveguides of different sizes can be optically connected together. Background technique [0002] In high-speed optical communication networks, waveguides are indispensable elements in integrated optical components. Waveguides are widely used in optical power splitters, optical couplers, optical modulators, interferometer-based switches, semiconductor lasers, and planar devices for dense wavelength-division multiplexing communications. [0003] figure 1 is a schematic diagram of a wavelength division multiplexer using an arrayed waveguide grating. The waveguide grating includes input and output waveguides 11 a and 11 b , two planar waveguides 13 a and 13 b , and an arrayed waveguide grating 15 . in such as figure 1 In the multiplexer shown, the part enclosed by the dotted li...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/13G02B6/12G02B6/122G02B6/136
CPCG02B6/1228G02B6/136G02B6/12
Inventor 李周勋崔德镕
Owner SAMSUNG ELECTRONICS CO LTD