Method and device for calibrating humidity sensor and sensor arrangement comprising humidity sensor that can be calibrated
A technology of humidity sensor and calibration method, which is applied in the direction of humidity indication, measuring device, instrument, etc.
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[0031] FIG. 1 shows a humidity sensor 1 in a gas-tight measuring chamber 2 . The measuring chamber 2 has a first gas connection 3 and a second gas connection 4, with which the measuring chamber can be connected on the one hand to a sufficient pressurizable device 5 and on the other hand to a pressure The hose 6 communicates with another air chamber.
[0032] Furthermore, a pressure sensor 7 is arranged in the measuring chamber 2 . The pressure sensor can be a commercially available pressure sensor, but it should be calibrated and have the highest possible measurement accuracy.
[0033] In order to measure, for example, the gas humidity in the pressurizable device 5 and simultaneously calibrate the humidity sensor 1 , the measuring chamber 2 is first connected to the pressurizable device 5 via a first gas connection 3 , so that gas exchange and pressure equalization can take place. The gas pressure in the measuring chamber is then measured with a pressure sensor 7 and the mea...
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