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Position detection device

A technology for detecting devices and relative positions, which is applied in the direction of measuring devices, using optical devices, and using optical devices to transmit sensing components, etc., which can solve the problems of unusable light sources and inability to provide optical power.

Inactive Publication Date: 2006-11-22
DR JOHANNES HEIDENHAIN GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this multimode diode laser cannot provide the necessary optical power, especially when the light from the light source is to be delivered to the scanning head with the signal generating mechanism through the optical fiber
For the scanning head of the position detection device that requires 10mW optical power, this light source cannot be used

Method used

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Embodiment Construction

[0021] exist figure 1 A fully expanded scanning optical path of an embodiment of the position detection device according to the present invention is shown in a simplified diagram. In the case of this exemplary embodiment, it is a position detection device based on the interferometric target principle, which additionally uses a plurality of gratings for signal generation. In the following, the principle of signal generation is briefly described before the mechanism according to the invention is described in detail in connection with the light sources used.

[0022] The position detection device according to the invention comprises a light source 1 in the form of a single-mode laser light source; Components; these components are referred to as signal generating means in the following description and are used to generate displacement-related output signals. As already mentioned above, alternatively other designs of signal generators, such as those used in known interferometer d...

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Abstract

The invention provides a position detection device, which is used to determine the relative position of two objects. The position detection device includes a light source and a signal generating mechanism for generating a displacement-dependent output signal. The light source is formed by a single-mode laser source and interacts via a feedback mechanism in such a way that a multimode excitation is generated in the single-mode laser source and a multimode operating mode of the single-mode laser source is realized.

Description

technical field [0001] The invention relates to a position detection device. Background technique [0002] Position detection devices based on optical principles are known for high-precision position detection, which utilize interference phenomena between two different superimposed sub-beams for generating a displacement-dependent output signal. Lasers are frequently used as light sources in such position detection devices, which provide light with sufficiently coherent properties. The lasers used may be gas lasers, solid-state lasers or also semiconductor lasers and diode lasers. The former are used, for example, in position-detection devices formed by interferometers, the latter in position-detection devices which, in order to generate displacement-dependent output signals, also include one or more gratings. In both laser types, it is necessary to ensure the stability of the supply wavelength, since false detections will occur for the position determination in the event ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00H01S5/00G01B9/02G01D5/26G01D5/347G01D5/36G01D5/38H01L31/12H01S5/14
CPCG01B2290/30G01B2290/45G01B2290/70G01D5/26G01D5/266G01D5/268G01D5/34723G01D5/38
Inventor W·霍尔扎普菲尔U·林尼曼
Owner DR JOHANNES HEIDENHAIN GMBH