Method and device for inspecting objects
A technology for detecting devices and objects, which is applied in the direction of measuring devices, optical devices, and optical testing of flaws/defects, etc., and can solve problems such as high speeds that are difficult to measure
Inactive Publication Date: 2002-01-30
麦戴塔自动控制股份公司
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However, this requires difficult to achieve high rates of measurement
Method used
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[0036] figure 1 A device according to one embodiment of the invention is presented. The device 1 is placed above a substrate carrying an object 2 to be detected. The device 1 and the object 2 are in relative motion, which is indicated by the arrow A. Object 2 can be of many different types of objects as previously described. For the sake of simplicity of illustration, however, let us assume in the following that the object 2 is a deposit of solder paste that has been dispensed on the surface of the substrate 4 . Generally speaking, the detected object 2 covered by the illuminated detection area is a deposit comprising several small points, but for the sake of clarity, only one point is shown in the figure.
[0037] The device 1 comprises a first radiation device 3 which generates radiation in a first frequency range, or a first wavelength range, and a second radiation device 5 which generates radiation in a second frequency range. In this embodiment, the first radiation de...
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This invention relates to a method for contactless inspection of objects on a substrate, by means of an inspection device during relative motion between the substrate and the inspection device. The method comprises the steps of: generating a first image comprising object height information by illuminating at least a portion of the substrate comprising one or more objects by means of first radiation means and imaging at least one of said one or more objects illuminated by said first radiation means onto a two-dimensional matrix sensor means having a portionwise addressable matrix of pixel elements; generating a second image comprising object area information by illuminating at least a portion of the substrate comprising one or more objects by means of second radiation means and imaging at least one of said one or more objects illuminated by said second radiation means onto said sensor means; extracting the object height information, by means of said sensor means, from said first image; and extracting the object area information, by means of said sensor means, from said second image. The invention also relates to a device for performing the above method.
Description
technical field [0001] The present invention generally relates to methods and apparatus for contactless detection of objects on a substrate under conditions of relative motion of the substrate and detection device. Background technique [0002] When placing objects on a substrate, the geometric and other properties of the objects are important to the performance of the resulting product. It is therefore desirable to be able to perform automatic detection of these properties quickly and accurately. Geometric properties may eg be volume, position on a substrate, diameter, profile shape, scratches, surface roughness, and the like. Other properties may be color and the like. Automatic detection of these properties is difficult to accomplish with high speed and accuracy. For example, during the process of applying solder paste to a substrate, the properties, such as volume and location, of the solder paste deposit obtained by dispensing or other similar methods are important t...
Claims
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IPC IPC(8): G01B11/02G01B11/04G01N21/89G01N21/956G06T1/00H01L21/52
CPCG01B11/04G01N21/89
Inventor 古纳·伯斯特罗姆马蒂尔斯·约翰内森西蒙·桑德格伦汉斯·埃赫伦
Owner 麦戴塔自动控制股份公司