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Micro lens and producing method, micro-lens array plate, electrooptical apparatus and electronic instrument

A technology of micro-lens and manufacturing method, which is applied in the direction of instruments, lenses, electric solid devices, etc., can solve problems such as difficulty in controlling the degree of aspheric surface of aspheric lenses, inability to manufacture aspheric lenses, and reduced yield, etc., to achieve excellent display quality Effect

Inactive Publication Date: 2004-01-21
SEIKO EPSON CORP
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Problems solved by technology

[0006] However, according to the above-mentioned conventional manufacturing method of microlenses, although spherical lenses can be manufactured relatively easily, aspheric lenses cannot be manufactured.
[0007] Furthermore, in order to manufacture an aspheric lens, it is conceivable to form an aspheric concave portion on the substrate with other materials and then transfer it to the substrate side, or perform a plurality of different-phase etching processes on the substrate in stages, etc. Manufacturing method
However, this manufacturing method is basically difficult, and will bring about an increase in manufacturing cost or a decrease in yield, and as the manufacturing process becomes highly complex, it will be technically difficult to control the degree of asphericity of the aspheric lens. question

Method used

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  • Micro lens and producing method, micro-lens array plate, electrooptical apparatus and electronic instrument
  • Micro lens and producing method, micro-lens array plate, electrooptical apparatus and electronic instrument
  • Micro lens and producing method, micro-lens array plate, electrooptical apparatus and electronic instrument

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Embodiment Construction

[0053] (Micro Lens Array Board)

[0054] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0055] First of all, for the microlens array plate that can be manufactured by the manufacturing method of the microlens of the present invention, refer to Figure 1 to Figure 5 Be explained. here, figure 1 is a schematic perspective view of a microlens array plate, figure 2 In order to enlarge the partially enlarged plan view of the four microlens parts in the present embodiment of the microlens array plate, image 3 It is a partially enlarged cross-sectional view of the microlens array plate of this embodiment, Figure 4 A partially enlarged cross-sectional view showing another microlens portion for enlargement, Figure 5 A partially enlarged cross-sectional view of a microlens array plate in its modified form.

[0056] Such as figure 1 As shown, the microlens array plate 20 of the present embodiment includes a transparent pla...

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Abstract

A method of manufacturing a microlens includes: forming on a transparent substrate a first film which has an etching rate higher than the transparent substrate, forming on the first film a mask in which a pit is provided at a position corresponding to a center of the microlens to-be-formed, and wet-etching the first film and the transparent substrate through the mask, to thereby excavate in the transparent substrate a non-spherical recess which defines a curved surface of the microlens.

Description

technical field [0001] The present invention belongs to the technical field constituting a method of manufacturing microlenses suitable for use in electro-optical devices such as liquid crystal devices, such as microlens array plates. The present invention also belongs to the technical field of a microlens manufactured by the manufacturing method, a microlens array plate, an electro-optical device provided with the microlens, and an electronic device provided with the electro-optical device. Background technique [0002] In electro-optical devices such as liquid crystal devices, various wirings such as data lines, scanning lines, and capacitor lines, or thin film transistors (hereinafter referred to as TFT (Thin Film Transistor)), thin film diodes (hereinafter referred to as TFD) are made in the image display area. (Thin Film Diode)) and other electronic components. Therefore, the area in each pixel that actually contributes to the transmission or reflection of light for di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00G02F1/1335G03F7/00
CPCG03F7/0005G02F1/133526H01L27/14627G02B3/0056G02B3/0031G02B3/0012G02B3/00
Inventor 小泽宣彦
Owner SEIKO EPSON CORP
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