Base plate conveying device

Abstract

To provide a transferring apparatus for which realizes simplification and miniaturization of structure, where an interval between a pair of holding arms for holding a substrate can be adjusted, without changing the center position, and the pair of holding arms can be rotated between a holding position for holding the substrate and a retreating position turned from the holding position by substantially 90[deg.]. The pair of holding arms 25 and 26 are borne, respectively rotatably by a pair of arm supporters 15 and 16 mounted to a base 10 in a state of being movable in a transport direction. The respective holding arms 25 and 26 are rotated, by a rotating apparatus between the holding position for holding the substrate projecting in a horizontal direction, nearly vertical to the transport direction and the retreating position rotated from the holding position by nearly 90[deg.]. The respective arm supporters 15 and 16 are moved in linkage by the same distance, in mutually opposite directions of the transport direction by an arm supporter connection and disconnection apparatus 50. The pair of supporters 15 and 16, holding the substrate, are moved integrally in the transport directionby a transporting-moving apparatus.

Description

Substrate transport device technical field The present invention relates to a transport device for transporting substrates between devices. Background technique In Patent Document 1, there is disclosed a transport device 14 that holds a substrate S for LCD with a pair of load arms 26 (in the background art and problems of the invention, the reference numerals shown in Patent Document 1 are given). Below, the substrate S held on the arm 26 in a horizontal state is adsorbed to the hole 38 opened on the upper surface of the arm 26 and connected to the negative pressure device, and is transported into and out of the inspection device 10 . The conveying device 40 is equipped with an X stage 31 movably along the X direction on the base 32 , and a rotating body 30 is mounted on the rotating body 31 on the X stage 31 . A connecting member 39 to which a pair of arms 26 is fixed is supported on the mounted support plate 28 so as to be movable in the Y direction. The inspection dev...

AI Technical Summary

Problems solved by technology

In the transport device described in Patent Document 1, since the substrate S for LCD is placed on a pair of arms 26 for transport, the amount of deflection of the substrate S can be suppressed to be small, but since the center position cannot be changed, it cannot be changed. The distance between the pair of arms 26, so when the distance between the arms 26 is adjusted according to the substrate S of different size, the center position between the pair of arms 26 will change, and the position of the transport device must be corrected due to the deviation of the center position.

In addition, since the pair of arms 26 is moved forward and backward between the holding position where the arm 26 protrudes toward the inspection device 10 and the retreat position where the arm 26 retreats from the inspection device 10 by moving the connecting member 39 in the Y direction, there is a device The problem of upscaling

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