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Six-legged type piezoelectric vibration gyroscope

A piezoelectric vibrating gyroscope and electrode technology, which is applied in the field of gyroscopes, can solve the problems of reducing rotation sensitivity, rotation sensitivity, that is, detection sensitivity decline, etc.

Inactive Publication Date: 2006-04-12
NEC CORP +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As a result, the rotation sensitivity, that is, the detection sensitivity, drops significantly.
In particular, the intensity of the spurious vibration of the in-plane vibration is much greater than the intensity of the spurious vibration of the vertical vibration, so it is the main cause of the decrease in the rotational sensitivity.

Method used

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  • Six-legged type piezoelectric vibration gyroscope
  • Six-legged type piezoelectric vibration gyroscope
  • Six-legged type piezoelectric vibration gyroscope

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Embodiment Construction

[0021] refer to figure 1 2, the hexapod piezoelectric vibration gyroscope according to the first embodiment of the present invention will be described.

[0022] This hexapod piezoelectric vibrating gyroscope includes a piezoelectric body 1 made of X-cut Langasite crystal. exist figure 1 In , the directionality of the Langsetter belonging to the trigonal crystal system and the direction of motion of the angular velocity Ω are represented by the X, Y, and Z axes. In addition, the piezoelectric body 1 may be made of X-cut crystal.

[0023] The piezoelectric body 1 includes: a rectangular plate-shaped main body 2 with the front and back as main surfaces, a pair of excitation arms 3a, 3b extending from one side of the main body 2 to the first direction A1 at a distance from each other, Between the arms 3a and 3b, a non-excitation arm 3c extending from one side of the main body 2 to the first direction A1 at intervals from one side of the main body 2 to the second direction oppos...

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Abstract

A six-legged type piezoelectric vibration gyroscope having a pair of exciting arms extending from a body ( 2 ) in a first direction (A 1 ) with a space therebetween, one non-exciting arm ( 3 c) extending in the first direction between the exciting arms from the body, a pair of detecting arms ( 4 a, 4 b) extending from the body in a second direction (A 2 ) with a space therebetween, and one non-detecting arm ( 4 c) extending in the second direction between the detecting arms from the body. The exciting arms are coupled with a drive-side electrode. The detecting arms are coupled with a detection-side electrode. The exciting arms, non-exciting arm, detecting arms, and non-detecting arm respectively consist of a piezoelectric. The respective exciting arms differ in width size from the non-exciting arm. The respective exciting arms differ in width size from the respective detecting arms. The respective exciting arms differ in width size from the non-detecting arm.

Description

technical field [0001] The present invention relates to a gyroscope used as an angular velocity detector in an attitude control device for car navigation or ship navigation, and more particularly to a piezoelectric vibrating gyroscope. Background technique [0002] As a gyroscope capable of detecting angular velocity with high precision, for example, a hexapod piezoelectric vibration gyroscope is disclosed in JP-A-2001-255152. The hexapod piezoelectric vibration gyroscope includes a piezoelectric body, a driving side electrode and a detection side electrode combined with the piezoelectric body. The piezoelectric body has a rectangular plate-shaped main body having front and back as main surfaces, a driving side arm extending from one of opposing sides of the main body, and a detecting side arm extending from the other side. The drive side arm part has a pair of excitation arms and a non-excitation arm between them. The detection side arm has a pair of detection arms and on...

Claims

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Application Information

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IPC IPC(8): G01C19/56G01P9/04H01L41/113G01C19/5642
CPCG01C19/5642
Inventor 井上武志山本满越智笃仓本健次中岛光浩
Owner NEC CORP
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