Applying apparatus
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- 艾美柯技术株式会社
- Publication Date
- 2006-08-30
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The present invention relates to a coating device for coating a coating liquid on a substrate surface such as a glass substrate. Background technique
[0002] Patent Document 1 proposes a coating device for forming color filters of three primary colors on a glass substrate for color liquid crystals, and a device for coating phosphor pastes of three primary colors on a light emitting substrate for a plasma display.
[0003] In the coating apparatus disclosed in Patent Document 1, two slit nozzles are arranged above a stage moved by a ball screw, two glass substrates are placed on the stage above the stage, and The two slit nozzles described above are used to coat two glass substrates at the same time, so the time is shortened compared to coating with one slit nozzle.
[0004] In the coating device disclosed in Patent Document 2, a substrate mounting table is arranged between a pair of rails, and three gate-type moving mechanisms are arranged across the...