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Coordinate measuring device

A coordinate measurement and device technology, applied in the field of coordinate measurement devices, to achieve the effect of temperature-dependent compensation

Inactive Publication Date: 2007-02-28
VISTEC SEMICON SYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The control accuracy of temperature and air humidity has certain technical limitations
It is likewise practically impossible to manufacture airtight, especially pressure-tight, chambers with reasonable effort, specifically because of the need for easy and rapid exchange of measuring objects

Method used

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  • Coordinate measuring device
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Embodiment Construction

[0025] FIG. 1 shows a coordinate measurement device with a reference beam interferometer 10 together with its reference beam path 33 and its measurement beam path 23 . The measurement beam impinges on a measurement mirror 22 which is attached to the traversable table 20 . The traversable platform 20 is traversable relative to the fixed base 21 and carries a measurement object (not shown). The reference beam impinges on a reference mirror 32 which is attached to a fixed lens assembly 30 . The lens assembly 30 is focused on a measurement point on a measurement object placed on the traversable stage 20 . During the measurement, the measurement object on the traversable stage 20 is moved by the traversable stage sufficiently that the lens assembly 30 is focused on another measurement point. The distance between two measurement points is measured by the reference beam interferometer 10 as a change in the distance of the traversable stage 20 relative to the lens assembly 30 . The...

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Abstract

The device has a measuring mirror installed at the table. A reflector surface of the mirror stands parallel to the direction of the table. A stationary reference mirror is aligned to the measuring mirror with a reference ray path, as well as a mechanism to determine the position of the table from the measuring signals is produced by a reference interferometer which is aligned to the reference mirror. A translucent, closed incompressible pipe with translucent windows at its ends, is inserted into the ray path. The windows have a negative temperature expansion coefficient.

Description

technical field [0001] The invention relates to a coordinate measuring device for determining the position of a traversable stage, wherein the position determination is performed by an interferometer, and wherein the different path lengths of the measurement and reference beam paths in the interferometer are determined by light transmission, switching off , incompressible body to compensate. Background technique [0002] Reference beam interferometers are used for high precision distance and position measurements and are, for example, an important component of mask and wafer measurement equipment in the semiconductor industry. These devices have precision in the range of a few nanometers for measuring the structure of today's highly integrated circuits. [0003] In high-precision interferometric measurements, the relative path difference is measured between a measurement mirror on a traversable measurement object in the measurement beam path and a fixed reference mirror in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/03
CPCG01B9/02058G03F7/70775G03F7/70883G01B11/026
Inventor 海登·麦克伯塞尔·汉斯·阿图尔
Owner VISTEC SEMICON SYST