Light-emitting device and producing method thereof
A light-emitting device and electrode technology, applied in lighting devices, electroluminescent light sources, fluorescence, etc., can solve problems such as the impossibility of obtaining high-brightness light and low-efficiency light-emitting devices
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0109] First, as shown in FIG. 1, a pair of series electrodes 2a, 2b were formed on a first glass substrate 1 having a thickness of 1.1 mm with a slit of 100 μm between facing electrodes. The electrodes 2a and 2b in this embodiment are made of hardened silver electrodes respectively, and are formed by screen printing using a mixture of silver particles and glass powder with an average particle diameter of 500nm, which is dispersed in organic Adhesive (produced by Japan Dexa Co., Ltd.).
[0110]A method of manufacturing the light emitting device in this embodiment will be described with reference to FIGS. 2-8. First, as shown in FIG. 2, a silver paste 3 is printed on a glass substrate 1. As shown in FIG. In this printing process, a metal mask (20 μm in thickness) having a pattern of slits (18 μm in width) used in silver paste printing was used. Next, the printed silver paste is fired at a temperature of 550° C. to obtain the silver electrode 4 shown in FIG. 3 which shrinks af...
Embodiment 2
[0116] First, as shown in FIG. 1 , a pair of series electrodes 2 a , 2 b were formed on a first glass substrate 1 having a thickness of 1.1 mm with a slit between opposing electrodes of 40 μm. The electrodes 2a, 2b in this embodiment are each made of a baked silver electrode in which a mixture of silver particles with an average particle diameter of 500 nm and glass frit is dispersed in an organic binder.
[0117] A method of forming a silver electrode in this embodiment will be described with reference to FIGS. 9-12. First, as shown in FIG. 9 , a protective film is formed on a glass substrate 1 . Next, the protective film 10 was processed to be patterned with slits having a width of 3 μm, thus producing a mask formed of the protective pattern as shown in FIG. 10 . Next, as shown in FIG. 11, the above-mentioned silver paste was printed with a squeegee to bury the slits thus formed. The silver paste is then dried and preliminarily hardened at a temperature of 150°C. Thereaft...
Embodiment 3
[0122] First, as shown in FIG. 1, a pair of series electrodes 2a, 2b are provided on a first glass substrate 1 having a thickness of 1.1 mm with a slit between opposite electrodes of 40 μm. The electrodes 2a, 2b in this embodiment are each made of copper.
[0123] A method of forming copper electrodes in this embodiment will be described with reference to FIGS. 13-16. First, as shown in FIG. 13 , a copper film 14 as an electrode material film was formed on a glass substrate 1 by an electroless plating method to obtain a copper film 14 having a thickness of 17 μm. On this copper film 14 , a mask formed of a resist pattern 15 having a slit with a width of 3 μm was formed as shown in FIG. 14 .
[0124] Next, by using a reactive ion etching (RIE) apparatus (ULVAC Co., Ltd.), as shown in FIG. 15 , the copper film 14 was etched to selectively remove the copper film. The etching in this case is at 1-100Pa, 10-200SCCM and 400-1000V DC bias (V dc ) conditions, in BCl 3 (boron trich...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 