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Device for generating X-ray or XUV radiation

A ray generation and X-ray technology, applied in X-ray tubes, irradiation devices, X-ray equipment, etc., can solve problems such as measurement errors and affect image quality, and achieve the effect of high position stability

Inactive Publication Date: 2007-05-09
COMET INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] A shortcoming of the known device is that there is a certain deviation between the concentration point of the elementary particle ray beam on the target object and the set hit point, which will affect the quality of the picture obtained by the perspective device, and in the measurement and Errors in measurement when adjusting and in adjusting data

Method used

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  • Device for generating X-ray or XUV radiation
  • Device for generating X-ray or XUV radiation
  • Device for generating X-ray or XUV radiation

Examples

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Embodiment Construction

[0033] FIG. 1 shows an exemplary embodiment of a device 2 according to the invention, which is used in this exemplary embodiment to generate XUV radiation. The device 2 is constructed in the manner of an x-ray tube and has a housing 4 whose interior 6 is designed as a vacuum chamber and can be evacuated through an opening 8 by means of a vacuum pump (not shown).

[0034] A particle source is arranged inside the vacuum chamber 6 for generating a beam of elementary particle radiation of charged particles, which in the exemplary embodiment consist of electrons emitted from the cathode. The electrons are accelerated by an annular shield 14 in the direction of an object 16 , which in the exemplary embodiment forms a layered object, in order to form a beam 12 of elementary particle beams. When impinging on the target 16, the electrons forming the elementary particle beam 12 are decelerated due to the generation of decelerating radiation, the spectrum of which depends on the energy o...

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PUM

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Abstract

Device for generating X-ray or XUV radiation includes a device for directing a particle beam of electrically charged particles towards a target. A deflection device for deflecting the particle beam is such that the central axis of the particle beam passes through a first point of deflection and a second point of deflection located at a distance from the first point of deflection in the direction of propagation of the beam. The first and second points of deflection lie on an axis in line with a determined or determinable point of impact of the particle beam with the target. The particle beam can be deflected by the deflection device in the direction of propagation of the beam in the region of one point of deflection independently from of a deflection of the particle beam in the region of the other point of deflection.

Description

technical field [0001] The present invention relates to an X-ray or XUV (extreme ultraviolet) ray generating device as claimed in claim 1 . Background technique [0002] Such devices are used to generate X-rays, such as the X-ray generators disclosed in US 3793549 and GB 1057284, and the XUV ray generators disclosed in WO 2004 / 023512A1, US 3138729, EP0887639A1 and US 4523327. For XUV (extreme ultraviolet) rays, the wavelength range should be about 0.25 to about 20 nm. Such a device is used, for example, in the inspection of electronic components, especially printed circuit boards, and in the control and adjustment of optical components according to the method shown. [0003] The known device is provided with a calibration device for calibrating a beam of elementary particle radiation of charged particles on an object, wherein the material of the object is chosen to be suitable for the ideal wavelength of the emitted radiation. [0004] A shortcoming of the known device is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J35/00H05G1/00H05G2/00G01N23/223G21K5/00
CPCH01J35/30H01J35/02H01J35/14H01J35/147H01J35/153G21K1/087G21K1/08
Inventor A·莱哈德
Owner COMET INC
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