Polyurethane polishing pad
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[0025] The following Table provides prepolymer and microsphere formulations for casting polyurethane cakes. These formulations contained various amounts of polymeric microspheres for producing porosity with different prepolymer formulations. These formulations tested toluene diiosocyanate [TDI] with polytetramethylene ether glycol [PTMEG], polypropylene ether glycol [PPG] and ester backbones from isocyanate-terminated prepolymers. As shown in following Tables, formulations 1 to 9 represent formulations of the invention and formulations A to E represent comparative examples. In particular, comparative example A corresponds to the formulation of Example 1 of U.S. Pat. No. 5,578,362; and comparative example B corresponds to the formulation of the IC1000™ polyurethane polishing pads sold by Rohm and Haas Electronic Materials CMP Technologies. The amount of NCO contained in the isocyanate-terminated prepolymers range from 5.3 to 9.11 percent.
TABLE 1Polishing Pad IngredientsEstimatedPol...
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