Electrostatic operation device
a technology of electrostatic operation and electric charge, which is applied in the direction of electrostatic generator/motor, capacitor, influence generator, etc., can solve the disadvantageous change in the amount of electric charge stored in the electret film, and achieve the effect of stabilizing the amount of power generation
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tenth embodiment
[0149]Referring to FIG. 19, an electrostatic induction power generating device 1g where ends of a surface of a stopper film 14c on a side of a movable electrode 24 are chamfered will be described in this tenth embodiment dissimilarly to the aforementioned eighth embodiment.
[0150]In this electrostatic induction power generating device 1g according to the tenth embodiment, a guard electrode 15 having a thickness of about 20 μm is formed on an upper surface of a fixed substrate 11 as shown in FIG. 10. The stopper film 14c having a thickness of about 1 μm is formed on an upper surface of the guard electrode 15. The stopper film 14c is an example of the “member” in the present invention. At this time, the ends of the surface of the stopper film 14c on the side of the movable electrode 24 are chamfered according to the tenth embodiment. A height of an upper surface of the stopper film 14c is formed to be a height enough to suppress contact between an electret film 13 and the movable elect...
eleventh embodiment
[0153]Referring to FIG. 20, an electrostatic induction power generating device 1h where a movable electrode 24a is so formed as to be embedded in a movable substrate 21a will be described in this eleventh embodiment dissimilarly to the aforementioned tenth embodiment.
[0154]In this electrostatic induction power generating device 1h according to the eleventh embodiment, the movable electrode 24a is so formed as to be embedded in the movable substrate21a as shown in FIG. 20. The movable substrate 21a is an example of the “first substrate” in the present invention. The movable electrode 24a is an example of the “first electrode” in the present invention. Thicknesses of the stopper film 14c and the guard electrode 15 are so formed that the total thickness of the stacked stopper film 14c and guard electrode 15 is larger than the total thickness of the stacked fixed electrode 12 and electret film 13. The remaining structure is similar to that of the tenth embodiment.
[0155]According to the ...
twelfth embodiment
[0157]Referring to FIG. 21, an electrostatic induction power generating device 1i where a movable substrate 21b vibrates in a direction Z will be described in this twelfth embodiment dissimilarly to the aforementioned seventh to eleventh embodiments.
[0158]In this electrostatic induction power generating device 1i according to the twelfth embodiment, a spring portion 22a is formed on an upper surface of the movable substrate 21b as shown in FIG. 21, and the movable substrate 21b moves in the direction Z to generate power. While an opposed area of the movable electrodes 24 and 24a and the electret film 13 is changed to generate power in the aforementioned seventh to eleventh embodiments, a distance between the movable electrode 24 and the electret film 13 is changed to generate power in the twelfth embodiment. The remaining structure is similar to that of the seventh embodiment.
[0159]The effects of the twelfth embodiment are similar to those of the aforementioned seventh embodiment.
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