Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus
a technology of lithographic projection apparatus and substrate, which is applied in the direction of optical devices, instruments, photomechanical devices, etc., can solve the problems of poor accuracy and introduction of overlay errors
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first embodiment
[0079]FIG. 4 schematically depicts a flow chart of a method of placing a substrate onto a surface of a substrate holder according to the invention. First, in action 61, an image of a plurality of burls on a surface of a substrate holder is acquired by means of an imaging apparatus. In case a transfer system as schematically depicted in FIG. 3 is used, the plurality of burls are provided on the second substrate holder 13 and the imaging apparatus corresponds to measurement unit 23.
[0080]Subsequently, in action 63, the position of the plurality of burls on the surface of the substrate holder is determined by processing of the image. This processing is performed by a processor. In case a transfer system as schematically depicted in FIG. 3 is used, the processor corresponds to processor 25. In an embodiment, the processing of the image involves the use of a pattern recognition technique.
[0081]Then, in action 65, the substrate placement data for enabling placement of the substrate at an ...
second embodiment
[0083]FIG. 5 schematically depicts a flow chart of a method of placing a substrate onto a surface of a substrate holder according to the invention. In this embodiment, in action 71, first, the position of each burl of a plurality of burls provided on a surface of a substrate holder is measured by means of a measurement sensor. In case a transfer system is used as schematically shown in FIG. 3, the measurement sensor corresponds with measurement unit 23 and the substrate holder corresponds with the second substrate holder 13.
[0084]Subsequently, in action 73, the position of the plurality of burls on the surface of the substrate holder by processing the position of each burl as measured. The construction by processing is performed by a processor. In case a transfer system is used as schematically depicted in FIG. 3, the processor corresponds with processor 25.
[0085]Then, in action 75, again substrate placement data are calculated for enabling placement of the substrate at an optimal p...
third embodiment
[0087]FIG. 6 schematically depicts a flow chart of a method of placing a substrate onto a surface of a substrate holder according to the invention. First, in action 81, a memory is provided. The memory comprises position data related to a position of a plurality of burls on a surface of a substrate holder. In case a transfer system is used as schematically depicted in FIG. 3, the memory corresponds to memory 27.
[0088]Additionally, in action 83, a substrate is provided. The substrate comprises a plurality of marks.
[0089]Subsequently, in action 85, the substrate is placed at a first position on the surface of the substrate holder, the position of each mark of the plurality of marks is measured, and a quality indicator is calculated. The quality indicator is a numerical value representing the quality of a certain position, i.e., a measure for an overlay error or a measure for the average amount of deformation taking place at that certain position.
[0090]In FIG. 7a, a top view of a subst...
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