This invention discloses a Maxwell force-driven three-degree-of-freedom
electromagnetic actuator and its control method. Four sets of permanent magnets are evenly distributed around the mover, and the permanent magnets are respectively connected to magnetic guide shoes and
stator magnetic arms located obliquely above and below the side wall of the mover. An
excitation coil is wound on the
stator magnetic arm, which is connected to a magnetic guide base. The magnetic guide base is connected to a magnetic guide column, which extends into the interior of the mover and is fixed in the middle of a flexible diaphragm. The flexible diaphragm is connected to the mover. The permanent magnets, magnetic guide shoes,
stator magnetic arms, magnetic guide base, and magnetic guide column together constitute a
magnetic circuit system, enabling the mover to simultaneously respond to three independent current excitation
modes, realizing integrated parallel drive of rotation around the X-axis and Y-axis and translation along the Z-axis. This invention solves the problems of structural redundancy, lack of
degrees of freedom, contradiction between
motion range and
linear drive, and control
coupling in existing electromagnetic actuators through the design of "three-degree-of-freedom integrated
magnetic circuit topology" and "misaligned mover-stator configuration".