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Method of manufacturing array substrate and thin film transistor array panel

A technology of thin film transistors and array panels, which is applied in the field of manufacturing of display devices, can solve the problems of time-consuming and time-consuming manufacturing of array substrates

Active Publication Date: 2008-07-02
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above process requires six photolithography processes, making the fabrication of the array substrate time-consuming.

Method used

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  • Method of manufacturing array substrate and thin film transistor array panel
  • Method of manufacturing array substrate and thin film transistor array panel
  • Method of manufacturing array substrate and thin film transistor array panel

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Experimental program
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Embodiment Construction

[0044] 2 to 6 are a series of schematic diagrams illustrating the array substrate process according to an embodiment of the present invention to illustrate the manufacturing situation at each process stage, wherein FIGS. 2A, 3A, 4A, 5A, and 6A show a top view respectively. 2B-2C, 3B-3C, 4B-4C, 5B-5C, and 6B-6C respectively show the cross-sections corresponding to the B-B and C-C lines in the upper view. Each photolithography process described here includes resist coating, using a patterned photomask, resist exposure, resist development, film layer etching, and removal of residual resist, etc., which are well known to those skilled in the art. Each photolithography process can be performed by standard photolithography equipment commonly used in the industry, and the above process steps are collectively referred to as "photolithography process" hereinafter.

[0045] Please refer to FIG. 2A , which partially shows a top view of a TFT array panel 200 . The thin film transistor ar...

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Abstract

This invention relates to an array base board process method, which comprises the following steps: forming a first metal layer on one base board; executing one first etching process for the first metal layer pattern; forming one grating wire with its one grating electrode connected to the wire and with one connection pad to the base board; forming an insulating layer, a semi-conductive layer and an ohmic contact layer on the base board, which all cover the grating wire, grating electrode and the connection pad; executing a second etching process for the pattern of ohmic contact layer, the semi-conductive layer, the grating electrode and part of the insulating layer; forming a semi-conductive structure on the said base board and a dielectric hole in the insulating layer on connection pad to emerge part of the pad, wherein, said semi-conductive structure contains the said insulating layer grossly covering the grating electrode, patterning semi-conductive layer and the patterning ohmic contact layer.

Description

technical field [0001] The invention relates to the manufacture of a display device, in particular to a method for manufacturing a thin film transistor array substrate. Background technique [0002] In order to realize high-speed image processing and high-quality display images, flat panel displays such as color liquid crystal display devices have been widely used in recent years. In a liquid crystal display device, it usually includes two upper and lower substrates with electrodes, which are bonded together by adhesive or sealing material. The liquid crystal material is filled between the two substrates, and in order to maintain a fixed distance between the two plates, particles with a certain particle size are dispersed between the two plates. Usually, a thin film transistor used as a switching element is formed on the surface of the lower substrate. The thin film transistor has a gate electrode connected to a scanning line and a drain electrode connected to a signal line...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1333G02F1/136G03F7/20H01L21/027H01L29/786
Inventor 廖达文
Owner AU OPTRONICS CORP